TY - JOUR
T1 - Effects of electron irradiation on two-dimensional electron gas in algaas/gaas heterostructure
AU - Wada, Toshimi
AU - Kanayama, Toshihiko
AU - Ichimura, Shingo
AU - Sugiyama, Yoshinobu
AU - Mlsawa, Shunji
AU - Komuro, Masanori
PY - 1993/12
Y1 - 1993/12
N2 - This paper describes how the two-dimensional electron gases in AlGaAs/GaAs heterostructures are degraded by low-energy electron irradiation. Both the electron mobility and the two-dimensional carriers are shown to decrease considerably by a 1 x 1017/cm2 irradiation with the incident electron energy of 8 keV. Comparing the experimental results both with the Monte Carlo simulation and with the theoretical mobility calculation, we speculated that the mobility degradation and the 2D carrier compensation are partly caused by the formation of complex defects in the GaAs buffer layer which are due to the excitations of core electrons of As and that the mobility is further degraded by the formation of short-range scatterers in the AlGaAs/GaAs heterointerface.
AB - This paper describes how the two-dimensional electron gases in AlGaAs/GaAs heterostructures are degraded by low-energy electron irradiation. Both the electron mobility and the two-dimensional carriers are shown to decrease considerably by a 1 x 1017/cm2 irradiation with the incident electron energy of 8 keV. Comparing the experimental results both with the Monte Carlo simulation and with the theoretical mobility calculation, we speculated that the mobility degradation and the 2D carrier compensation are partly caused by the formation of complex defects in the GaAs buffer layer which are due to the excitations of core electrons of As and that the mobility is further degraded by the formation of short-range scatterers in the AlGaAs/GaAs heterointerface.
KW - AlGaAs/GaAs
KW - Electron beam lithography
KW - Irradiation-induced damage
KW - Mobility
KW - Monte Carlo simulation
KW - Two-dimensional carrier
KW - Two-dimensional electron gas
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U2 - 10.1143/JJAP.32.6262
DO - 10.1143/JJAP.32.6262
M3 - Article
AN - SCOPUS:0027867584
VL - 32
SP - 6262
EP - 6267
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 12 S
ER -