Effects of substrate heating and biasing on nanostructural evolution of nonepitaxially grown TiN nanofilms

T. Q. Li^*, S. Noda, F. Okada, H. Komiyama

^*この研究の対応する著者

研究成果: Article › 査読

15 被引用数 (Scopus)

本文言語	English
ページ（範囲）	2512-2516
ページ数	5
ジャーナル	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
巻	21
号	6
DOI	https://doi.org/10.1116/1.1621654
出版ステータス	Published - 2003
外部発表	はい

ASJC Scopus subject areas

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AU - Noda, S.

AU - Okada, F.

AU - Komiyama, H.

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