TY - JOUR
T1 - EHD micro pump using pyrolyzed polymer 3-D carbon mesh electrodes
AU - Wakui, Daisuke
AU - Imai, Naoki
AU - Nagaura, Yasuhiro
AU - Sato, Hironobu
AU - Sekiguchi, Tetsushi
AU - Konishi, Satoshi
AU - Sholil, Shuichi
AU - Homma, Takayuki
PY - 2009
Y1 - 2009
N2 - This paper presents the EHD (electro-hydrodynamic) micro pump using 3-D carbon mesh electrodes. The carbon electrodes were fabricated by pyrolysis of SU-8 micro mesh structures [1]. Low temperature SU-8 bonding method under 90°C was developed to realize wafer level carbon structure packaging. The pumping behaviors were evaluated using fluorinert as a sample solution. The maximum pressure and volume flow rate are about 23Pa and 400nL/min under applied voltage of 500V.
AB - This paper presents the EHD (electro-hydrodynamic) micro pump using 3-D carbon mesh electrodes. The carbon electrodes were fabricated by pyrolysis of SU-8 micro mesh structures [1]. Low temperature SU-8 bonding method under 90°C was developed to realize wafer level carbon structure packaging. The pumping behaviors were evaluated using fluorinert as a sample solution. The maximum pressure and volume flow rate are about 23Pa and 400nL/min under applied voltage of 500V.
UR - http://www.scopus.com/inward/record.url?scp=65949113622&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=65949113622&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2009.4805428
DO - 10.1109/MEMSYS.2009.4805428
M3 - Conference article
AN - SCOPUS:65949113622
SP - 499
EP - 502
JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SN - 1084-6999
M1 - 4805428
T2 - 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009
Y2 - 25 January 2009 through 29 January 2009
ER -