EHD micro pump using pyrolyzed polymer 3-D carbon mesh electrodes

Daisuke Wakui; Naoki Imai; Yasuhiro Nagaura; Hironobu Sato; Tetsushi Sekiguchi; Satoshi Konishi; Shuichi Sholil; Takayuki Homma

doi:10.1109/MEMSYS.2009.4805428

EHD micro pump using pyrolyzed polymer 3-D carbon mesh electrodes

Daisuke Wakui, Naoki Imai, Yasuhiro Nagaura, Hironobu Sato, Tetsushi Sekiguchi, Satoshi Konishi, Shuichi Sholil, Takayuki Homma

研究成果: Conference article

5 引用（Scopus）

抜粋

This paper presents the EHD (electro-hydrodynamic) micro pump using 3-D carbon mesh electrodes. The carbon electrodes were fabricated by pyrolysis of SU-8 micro mesh structures [1]. Low temperature SU-8 bonding method under 90°C was developed to realize wafer level carbon structure packaging. The pumping behaviors were evaluated using fluorinert as a sample solution. The maximum pressure and volume flow rate are about 23Pa and 400nL/min under applied voltage of 500V.

元の言語	English
記事番号	4805428
ページ（範囲）	499-502
ページ数	4
ジャーナル	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOI	https://doi.org/10.1109/MEMSYS.2009.4805428
出版物ステータス	Published - 2009
イベント	22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy 継続期間: 2009 1 25 → 2009 1 29

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

文献にアクセス

10.1109/MEMSYS.2009.4805428

フィンガープリント EHD micro pump using pyrolyzed polymer 3-D carbon mesh electrodes' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。

これを引用

Wakui, D., Imai, N., Nagaura, Y., Sato, H., Sekiguchi, T., Konishi, S., Sholil, S., & Homma, T. (2009). EHD micro pump using pyrolyzed polymer 3-D carbon mesh electrodes. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 499-502. [4805428]. https://doi.org/10.1109/MEMSYS.2009.4805428

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abstract = "This paper presents the EHD (electro-hydrodynamic) micro pump using 3-D carbon mesh electrodes. The carbon electrodes were fabricated by pyrolysis of SU-8 micro mesh structures [1]. Low temperature SU-8 bonding method under 90°C was developed to realize wafer level carbon structure packaging. The pumping behaviors were evaluated using fluorinert as a sample solution. The maximum pressure and volume flow rate are about 23Pa and 400nL/min under applied voltage of 500V.",

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journal = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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AU - Wakui, Daisuke

AU - Imai, Naoki

AU - Nagaura, Yasuhiro

AU - Sato, Hironobu

AU - Sekiguchi, Tetsushi

AU - Konishi, Satoshi

AU - Sholil, Shuichi

AU - Homma, Takayuki

PY - 2009

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AB - This paper presents the EHD (electro-hydrodynamic) micro pump using 3-D carbon mesh electrodes. The carbon electrodes were fabricated by pyrolysis of SU-8 micro mesh structures [1]. Low temperature SU-8 bonding method under 90°C was developed to realize wafer level carbon structure packaging. The pumping behaviors were evaluated using fluorinert as a sample solution. The maximum pressure and volume flow rate are about 23Pa and 400nL/min under applied voltage of 500V.

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JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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