抄録
We developed a microelectromechanical-system optical interferometer based on an elastomer nanosheet using a polystyrene-polybutadiene-polystyrene (SBS) triblock copolymer for a suspended membrane as a way to improve the stress sensitivity for surface stress detection. The elastomeric SBS nanosheet provides a low Young's modulus of 28 ± 11 MPa, a large elastic strain of 24 ± 12%, and high adhesiveness, of which the surface charge and mechanical property are tunable by layer-by-layer (LbL) deposition of polysaccharides. A freestanding SBS nanosheet can be formed above a microcavity using a dry transfer technique without applying vacuum or higherature processes. The maximum deflection associated with molecular adsorption increased by sevenfold compared with a parylene-C-based optical interferometric transducer.
本文言語 | English |
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ページ(範囲) | 381-389 |
ページ数 | 9 |
ジャーナル | MRS Communications |
巻 | 9 |
号 | 1 |
DOI | |
出版ステータス | Published - 2019 3 1 |
ASJC Scopus subject areas
- Materials Science(all)