Electrode optimization of 100mhz high-frequency quartz resonator based on equivalent mass method

Jing Ji, Hiroshi Oigawa, Meng Zhao, Hang Yu, Toshitsugu Ueda

研究成果: Article

5 引用 (Scopus)

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Electrode optimization based on the equivalent mass method was carried out for a 100 MHz high-frequency fundamental thickness-shear AT-cut (quartz cut with a cutting angle of about 35.25 to the optic axis of the crystal) quartz resonator. Firstly, the electrode dimensions were optimized through three-dimensional finite-element modeling by the equivalent mass method. Secondly, on the basis of simulation results, 100 MHz fundamental frequency resonators were fabricated and quality factors were measured. The experimental and calculated results are highly consistent with the simulation results. The equivalent mass method combined with the finite-element method is confirmed to be applicable in the development of high-frequency quartz resonators.

元の言語English
記事番号025201
ジャーナルJapanese Journal of Applied Physics
52
発行部数2
DOI
出版物ステータスPublished - 2013 2

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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