Electrodeposition of ZnO from acetate bath for thermoelectric devices

H. Matsuo, K. Yoshitoku, D. Furuyama, Mikiko Saito, Takayuki Homma

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

We attempted to form ZnO films with smooth surface for the application of thermoelectric micro-devices, using electrodeposition process. In order to reduce the defects of the films such as cracks and pits mainly caused by the gas evolution, the bath containing acetate in addition to nitrate ions was developed to reduce the gas evolution during the deposition. Using this bath, formation of ZnO. rather than Zn metallic films, was confirmed by Raman spectroscopy. The films had no cracks and the surface became smoother than those eiectrodeposited from the conventional nitrate-based bath. In order to fabricate the micro- devices, The ZnO was eiectrodeposited into the patterns with diameter of 200μm. As a result, ZnO successfully filled the pattern keeping the smooth surface conditions, which demonstrated the applicability of the ZnO films to micro-device fabrication.

本文言語English
ホスト出版物のタイトルGeneral Student Poster Session
出版社Electrochemical Society Inc.
ページ143-148
ページ数6
75
52
ISBN(電子版)9781607685395
DOI
出版ステータスPublished - 2016 1 1
イベントSymposium on General Student Poster Session - PRiME 2016/230th ECS Meeting - Honolulu, United States
継続期間: 2016 10 22016 10 7

Other

OtherSymposium on General Student Poster Session - PRiME 2016/230th ECS Meeting
CountryUnited States
CityHonolulu
Period16/10/216/10/7

ASJC Scopus subject areas

  • Engineering(all)

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