Energy reversible Si-based NEMS Switch for nonvolatile logic systems

Liam Boodhoo*, Yun Peng Lin, Harold M.H. Chong, Yoshishige Tsuchiya, Tsuyoshi Hasegawa, Hiroshi Mizuta

*この研究の対応する著者

研究成果

6 被引用数 (Scopus)

抄録

The paper presents design, analysis and fabrication of novel silicon-based, low power, non-volatile NEMS logic switches. Non-volatility is achieved by exploiting the Casimir effect and the van der Waals force at mechanical contact between an in-plane, laterally moveable transistor channel and two opposing side gates. Mechanical symmetry is implemented in the design for switching to be energy reversible. Device operation is simulated by coupling close range interatomic force calculations with 3D FEM simulation. 'On' and 'Off' transistor states are maintained by controlling the surface area of mechanical contact between the beam and the gate electrode. To achieve this, two nano-stiction state controller designs are proposed for experimental comparison. Preliminary devices have been successfully fabricated using ebeam lithography to verify minimum feature size of proposed structures.

本文言語English
ホスト出版物のタイトル8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
ページ558-561
ページ数4
DOI
出版ステータスPublished - 2013
外部発表はい
イベント8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 - Suzhou, China
継続期間: 2013 4 72013 4 10

出版物シリーズ

名前8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013

Other

Other8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
国/地域China
CitySuzhou
Period13/4/713/4/10

ASJC Scopus subject areas

  • 生化学、遺伝学、分子生物学(その他)
  • バイオテクノロジー

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