Enhancement of GHz electromechanical coupling coefficient kt2of MgZnO and CaZnO thin film BAW resonators

研究成果: Conference contribution

抄録

Electromechanical coupling coefficient kt2 of MgZnO and CaZnO thin films in the UHF frequency ranges have not been reported. In this study, the relationship between kt2 and dopant concentration of MgZnO and CaZnO thin films was investigated. In addition, longitudinal wave velocity VL of the MgZnO and CaZnO thin films was estimated. It has been found that kt2 and VL of MgZnO increases with increasing Mg concentration. With respect to CaZnO, {k{mathrm{t}}}-{2} increases, whereas VL decreases with increasing Ca concentration.

本文言語English
ホスト出版物のタイトルIUS 2020 - International Ultrasonics Symposium, Proceedings
出版社IEEE Computer Society
ISBN(電子版)9781728154480
DOI
出版ステータスPublished - 2020 9 7
イベント2020 IEEE International Ultrasonics Symposium, IUS 2020 - Las Vegas, United States
継続期間: 2020 9 72020 9 11

出版物シリーズ

名前IEEE International Ultrasonics Symposium, IUS
2020-September
ISSN(印刷版)1948-5719
ISSN(電子版)1948-5727

Conference

Conference2020 IEEE International Ultrasonics Symposium, IUS 2020
CountryUnited States
CityLas Vegas
Period20/9/720/9/11

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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