Rare-earth-substituted lead zirconate titanate thin films were synthesized to improve the ferroelectric properties of lead zirconate titanate through the enhancement of its crystal anisotropy. Thin films of Pb1.00-(3x/2)o- REx(Zr0.40Ti0.60)O3 [RE-PZT(A)] and Pb1.00REx(Zr0.40Ti0.60) 1-(3x/4)O3 [RE-PZT(B)] with RE = La or Dy were deposited on (111)Pt/Ti/SiO2/(100)Si substrates by chemical solution deposition (CSD). Rare-earth-substitution did not affect the crystal orientation of the PZT-based films where the PZT(111) plane was oriented along the surface-normal direction. Dy3+ substitution based on DyPZT(B) up to x = 0.02 enhanced the crystal anisotropy (c/a) and remanent polarization (Pr) of PZT films simultaneously, while both c/a and Pr values of Dy-PZT(A) decreased as x increased continuously. On the other hand, La 3+ substitution degraded the ferroelectric properties gradually in both the case of La-PZT(A) and (B). The Dy3+ ion could be substituted for a B-site in a PZT crystal preferentially, and that promoted the crystal anisotropy and the ferroelectric properties of PZT films.
|ジャーナル||Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers|
|出版ステータス||Published - 2005 9月 22|
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