Enhancement of sensitivity for the evaluation of electrical properties by modifying the nano structure of microwave AFM probe

Lan Zhang*, Yang Ju, Atsushi Hosoi, Akifumi Fujimoto

*この研究の対応する著者

研究成果: Conference contribution

抄録

To confirm the sensitivity in the measurement of electrical properties affected by the nano structure of microwave AFM (M-AFM) probe, three kinds of M-AFM probe with a nano-slit on its tip in different width (75 nm, 120 nm and 160 nm) were investigated. Au and glass samples were measured by the probes working at a non-contact AFM mode. The M-AFM probe with the nano-slit having the width of 75 nm, by which the difference of the measured voltage between Au and glass samples is 55.1 mV, shows the highest sensitivity for detecting electrical properties of materials. As the result illustrated, the M-AFM probe with smaller width nano-slit on the tip can be considered to be an ideal nano structure.

本文言語English
ホスト出版物のタイトルAdvanced Material Science and Technology
出版社Trans Tech Publications Ltd
ページ555-558
ページ数4
ISBN(印刷版)9783037850497
DOI
出版ステータスPublished - 2011
外部発表はい

出版物シリーズ

名前Materials Science Forum
675 677
ISSN(印刷版)0255-5476
ISSN(電子版)1662-9752

ASJC Scopus subject areas

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学

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