Enhancement of thermoelectric power of a Si nanowire micro thermoelectric generator by improving the thermal conductivity of AlN thermally conductive film

Tianzhuo Zhan, R. Yamato, S. Hashimoto, S. Oba, Y. Himeda, Y. Xu, T. Matsukawa, Takanobu Watanabe

研究成果: Conference article

抄録

We report the enhancement of thermoelectric power of Si nanowire micro thermoelectric generator (SiNW-μTEG) by improving the thermal conductivity of aluminum nitride (AlN) thermally conductive film. This work builds on the previous results that have been reported at SSDM 2017. [1] This work shows the measured thermal conductivities of the two different AlN films to understand the underlying mechanisms of the enhancement of the thermoelectric power.

元の言語English
記事番号012131
ジャーナルJournal of Physics: Conference Series
1052
発行部数1
DOI
出版物ステータスPublished - 2018 7 26
イベント17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2017 - Kanazawa, Japan
継続期間: 2017 11 142017 11 17

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thermoelectric generators
aluminum nitrides
nanowires
thermal conductivity
augmentation

ASJC Scopus subject areas

  • Physics and Astronomy(all)

これを引用

Enhancement of thermoelectric power of a Si nanowire micro thermoelectric generator by improving the thermal conductivity of AlN thermally conductive film. / Zhan, Tianzhuo; Yamato, R.; Hashimoto, S.; Oba, S.; Himeda, Y.; Xu, Y.; Matsukawa, T.; Watanabe, Takanobu.

:: Journal of Physics: Conference Series, 巻 1052, 番号 1, 012131, 26.07.2018.

研究成果: Conference article

@article{dd7c5269b171415a9eedc2df56cc3c27,
title = "Enhancement of thermoelectric power of a Si nanowire micro thermoelectric generator by improving the thermal conductivity of AlN thermally conductive film",
abstract = "We report the enhancement of thermoelectric power of Si nanowire micro thermoelectric generator (SiNW-μTEG) by improving the thermal conductivity of aluminum nitride (AlN) thermally conductive film. This work builds on the previous results that have been reported at SSDM 2017. [1] This work shows the measured thermal conductivities of the two different AlN films to understand the underlying mechanisms of the enhancement of the thermoelectric power.",
author = "Tianzhuo Zhan and R. Yamato and S. Hashimoto and S. Oba and Y. Himeda and Y. Xu and T. Matsukawa and Takanobu Watanabe",
year = "2018",
month = "7",
day = "26",
doi = "10.1088/1742-6596/1052/1/012131",
language = "English",
volume = "1052",
journal = "Journal of Physics: Conference Series",
issn = "1742-6588",
publisher = "IOP Publishing Ltd.",
number = "1",

}

TY - JOUR

T1 - Enhancement of thermoelectric power of a Si nanowire micro thermoelectric generator by improving the thermal conductivity of AlN thermally conductive film

AU - Zhan, Tianzhuo

AU - Yamato, R.

AU - Hashimoto, S.

AU - Oba, S.

AU - Himeda, Y.

AU - Xu, Y.

AU - Matsukawa, T.

AU - Watanabe, Takanobu

PY - 2018/7/26

Y1 - 2018/7/26

N2 - We report the enhancement of thermoelectric power of Si nanowire micro thermoelectric generator (SiNW-μTEG) by improving the thermal conductivity of aluminum nitride (AlN) thermally conductive film. This work builds on the previous results that have been reported at SSDM 2017. [1] This work shows the measured thermal conductivities of the two different AlN films to understand the underlying mechanisms of the enhancement of the thermoelectric power.

AB - We report the enhancement of thermoelectric power of Si nanowire micro thermoelectric generator (SiNW-μTEG) by improving the thermal conductivity of aluminum nitride (AlN) thermally conductive film. This work builds on the previous results that have been reported at SSDM 2017. [1] This work shows the measured thermal conductivities of the two different AlN films to understand the underlying mechanisms of the enhancement of the thermoelectric power.

UR - http://www.scopus.com/inward/record.url?scp=85051323192&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85051323192&partnerID=8YFLogxK

U2 - 10.1088/1742-6596/1052/1/012131

DO - 10.1088/1742-6596/1052/1/012131

M3 - Conference article

AN - SCOPUS:85051323192

VL - 1052

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

SN - 1742-6588

IS - 1

M1 - 012131

ER -