We report the enhancement of thermoelectric power of Si nanowire micro thermoelectric generator (SiNW-μTEG) by improving the thermal conductivity of aluminum nitride (AlN) thermally conductive film. This work builds on the previous results that have been reported at SSDM 2017.  This work shows the measured thermal conductivities of the two different AlN films to understand the underlying mechanisms of the enhancement of the thermoelectric power.
|ジャーナル||Journal of Physics: Conference Series|
|出版ステータス||Published - 2018 7月 26|
|イベント||17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2017 - Kanazawa, Japan|
継続期間: 2017 11月 14 → 2017 11月 17
ASJC Scopus subject areas