Enhancement of thermoelectric power of a Si nanowire micro thermoelectric generator by improving the thermal conductivity of AlN thermally conductive film

T. Zhan, R. Yamato, S. Hashimoto, S. Oba, Y. Himeda, Y. Xu, T. Matsukawa, T. Watanabe

研究成果: Conference article

抜粋

We report the enhancement of thermoelectric power of Si nanowire micro thermoelectric generator (SiNW-μTEG) by improving the thermal conductivity of aluminum nitride (AlN) thermally conductive film. This work builds on the previous results that have been reported at SSDM 2017. [1] This work shows the measured thermal conductivities of the two different AlN films to understand the underlying mechanisms of the enhancement of the thermoelectric power.

元の言語English
記事番号012131
ジャーナルJournal of Physics: Conference Series
1052
発行部数1
DOI
出版物ステータスPublished - 2018 7 26
イベント17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2017 - Kanazawa, Japan
継続期間: 2017 11 142017 11 17

ASJC Scopus subject areas

  • Physics and Astronomy(all)

フィンガープリント Enhancement of thermoelectric power of a Si nanowire micro thermoelectric generator by improving the thermal conductivity of AlN thermally conductive film' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。

  • これを引用