Epitaxial piezoelectric layer SMR fabricated using epitaxial sacrificial layer process

Shinya Kudo, Satoshi Tokai, Takahiko Yanagitani

研究成果: Conference contribution

抄録

Single crystalline piezoelectric layer is expected to possess higher power durability and Q factor than polycrystalline because the dielectric and mechanical loss increases due to the grain boundary. In this study, we introduce a method to fabricate epitaxial piezoelectric layer on acoustic Bragg reflector using wet etching of epitaxial sacrificial layer. First, (0001) ZnO epitaxial films were grown on epitaxial (111) Au / (111) Pt / (0001) sapphire substrate by magnetron sputtering. Next, the polycrystalline Pt bottom electrode and the acoustic Bragg reflector based on 2 pairs of SiO2 / Mo were deposited on ZnO epitaxial films. After etching Au epitaxial sacrificial layer, SMR based on Au / epitaxial ZnO / Pt / Bragg reflector were fabricated. The crystallinity of epitaxial layers was determined by X-ray diffraction. FWHM values of the ω-scan rocking curves of Pt, Au and ZnO were determined as 0.25°, 0.27° and 0.80°, respectively. Moreover, six symmetry was clearly observed in Pt, Au and ZnO epitaxial layers. Real part of impedance characteristics of resonator was measured by a network analyzer. Resonance peak was observed at 1.3 GHz.

本文言語English
ホスト出版物のタイトルIEEE MTT-S International Conference on Microwave Acoustics and Mechanics, IC-MAM 2022
出版社Institute of Electrical and Electronics Engineers Inc.
ページ86-89
ページ数4
ISBN(電子版)9781665468312
DOI
出版ステータスPublished - 2022
外部発表はい
イベント1st IEEE MTT-S International Conference on Microwave Acoustics and Mechanics, IC-MAM 2022 - Munich, Germany
継続期間: 2022 7月 182022 7月 20

出版物シリーズ

名前IEEE MTT-S International Conference on Microwave Acoustics and Mechanics, IC-MAM 2022

Conference

Conference1st IEEE MTT-S International Conference on Microwave Acoustics and Mechanics, IC-MAM 2022
国/地域Germany
CityMunich
Period22/7/1822/7/20

ASJC Scopus subject areas

  • 計算力学
  • 電子工学および電気工学
  • 材料力学
  • 電子材料、光学材料、および磁性材料
  • 音響学および超音波学

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