Evaluation of anisotropic biaxial stress in Si1-xGex/Ge mesa-structure by oil-immersion raman spectroscopy

S. Yamamoto, K. Takeuchi, R. Yokogawa, M. Tomita, D. Kosemura, K. Usuda, A. Ogura

研究成果: Conference contribution

12 被引用数 (Scopus)

抄録

Si1-xGex is one of the prospective materials for the next-generation transistors due to its high carrier mobility, especially for high Ge concentration Si1-xGex. Inducing strain in the Si1-xGex leads to transistor performance improvement, however it is difficult to evaluate strain induced in the channel region because the strained Si1-xGex channel may be scaled down to nanosize and relaxed complicatedly. We adopted oil-immersion Raman spectroscopy to evaluate the stress in the Si1-xGex nanostructure. In this technique, the anisotropic biaxial stress state in the Si1-xGex nanostructure can be evaluated. As a result, the nanostructure size dependence of the biaxial stress states in the Si1-xGex mesa structure on the Ge substrates was obtained, which was confirmed for the Si1-xGex with 76, 85, 92% Ge concentrations.

本文言語English
ホスト出版物のタイトルSilicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 5
編集者F. Roozeboom, V. Narayanan, K. Kakushima, P. J. Timans, E. P. Gusev, Z. Karim, S. DeGendt
出版社Electrochemical Society Inc.
ページ39-45
ページ数7
4
ISBN(電子版)9781607685395
DOI
出版ステータスPublished - 2015
外部発表はい
イベントSymposium on Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 5 - 227th ECS Meeting - Chicago, United States
継続期間: 2015 5月 242015 5月 28

出版物シリーズ

名前ECS Transactions
番号4
66
ISSN(印刷版)1938-6737
ISSN(電子版)1938-5862

Other

OtherSymposium on Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 5 - 227th ECS Meeting
国/地域United States
CityChicago
Period15/5/2415/5/28

ASJC Scopus subject areas

  • 工学(全般)

フィンガープリント

「Evaluation of anisotropic biaxial stress in Si1-xGex/Ge mesa-structure by oil-immersion raman spectroscopy」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル