Evaluation of UV roller imprinting using replicated fluorinated film molds

T. Shibazaki*, L. Li, H. Shinohara, S. Shoji, J. Mizuno, K. Tsunozaki, Y. Kawaguchi

*この研究の対応する著者

研究成果

1 被引用数 (Scopus)

抄録

In this study, a fluorinated UV-curable resin was replicated by UV imprinting and used as a film mold. The film mold was fabricated by anti-sticking process (ACP). A remarkable advantage of the application for easy mold fabrication is expected, because it uses only UV imprinting. We evaluated two types of the pattern replications, directions between the stage movement and line and space (L&S) patterns in perpendicular as well as in parallel. The results of replication tests show obvious difference between UV roller imprinting and UV roller press imprinting. In addition, Vickers hardness is measured to evaluate the thermal property of UV roller imprinting. The results indicate that temperature is effective not only to improve pattern replication, but also to accelerate UV curing.

本文言語English
ホスト出版物のタイトルNEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
ページ1254-1257
ページ数4
DOI
出版ステータスPublished - 2011 10 4
イベント6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 - Kaohsiung, Taiwan, Province of China
継続期間: 2011 2 202011 2 23

出版物シリーズ

名前NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Conference

Conference6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
国/地域Taiwan, Province of China
CityKaohsiung
Period11/2/2011/2/23

ASJC Scopus subject areas

  • 原子分子物理学および光学

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