TY - GEN
T1 - Evaluation of UV roller imprinting using replicated fluorinated film molds
AU - Shibazaki, T.
AU - Li, L.
AU - Shinohara, H.
AU - Shoji, S.
AU - Mizuno, J.
AU - Tsunozaki, K.
AU - Kawaguchi, Y.
PY - 2011/10/4
Y1 - 2011/10/4
N2 - In this study, a fluorinated UV-curable resin was replicated by UV imprinting and used as a film mold. The film mold was fabricated by anti-sticking process (ACP). A remarkable advantage of the application for easy mold fabrication is expected, because it uses only UV imprinting. We evaluated two types of the pattern replications, directions between the stage movement and line and space (L&S) patterns in perpendicular as well as in parallel. The results of replication tests show obvious difference between UV roller imprinting and UV roller press imprinting. In addition, Vickers hardness is measured to evaluate the thermal property of UV roller imprinting. The results indicate that temperature is effective not only to improve pattern replication, but also to accelerate UV curing.
AB - In this study, a fluorinated UV-curable resin was replicated by UV imprinting and used as a film mold. The film mold was fabricated by anti-sticking process (ACP). A remarkable advantage of the application for easy mold fabrication is expected, because it uses only UV imprinting. We evaluated two types of the pattern replications, directions between the stage movement and line and space (L&S) patterns in perpendicular as well as in parallel. The results of replication tests show obvious difference between UV roller imprinting and UV roller press imprinting. In addition, Vickers hardness is measured to evaluate the thermal property of UV roller imprinting. The results indicate that temperature is effective not only to improve pattern replication, but also to accelerate UV curing.
KW - UV roller imprinting
KW - UV roller press imprinting
KW - effect of heat
KW - fluorinated UV-curable resin
KW - stage direction of movement
UR - http://www.scopus.com/inward/record.url?scp=80053313653&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=80053313653&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2011.6017585
DO - 10.1109/NEMS.2011.6017585
M3 - Conference contribution
AN - SCOPUS:80053313653
SN - 9781612847757
T3 - NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
SP - 1254
EP - 1257
BT - NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
T2 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
Y2 - 20 February 2011 through 23 February 2011
ER -