TY - JOUR
T1 - Evanescently coupled rectangular microresonators in silicon-on-insulator with high Q-values
T2 - Experimental characterization
AU - Mendez Astudillo, Manuel
AU - Okayama, Hideaki
AU - Nakajima, Hirochika
PY - 2017/6/1
Y1 - 2017/6/1
N2 - We report on evanescently coupled rectangular microresonators with dimensions up to 20 × 10 μm2 in silicon-on-insulator in an add-drop filter configuration. The influence of the geometrical parameters of the device was experimentally characterized and a high Q value of 13,000 was demonstrated as well as the multimode optical resonance characteristics in the drop port. We also show a 95% energy transfer between ports when the device is operated in TM-polarization and determine the full symmetry of the device by using an eight-port configuration, allowing the drop waveguide to be placed on any of its sides, providing a way to filter and route optical signals. We used the FDTD method to analyze the device and e-beam lithography and dry etching techniques for fabrication.
AB - We report on evanescently coupled rectangular microresonators with dimensions up to 20 × 10 μm2 in silicon-on-insulator in an add-drop filter configuration. The influence of the geometrical parameters of the device was experimentally characterized and a high Q value of 13,000 was demonstrated as well as the multimode optical resonance characteristics in the drop port. We also show a 95% energy transfer between ports when the device is operated in TM-polarization and determine the full symmetry of the device by using an eight-port configuration, allowing the drop waveguide to be placed on any of its sides, providing a way to filter and route optical signals. We used the FDTD method to analyze the device and e-beam lithography and dry etching techniques for fabrication.
KW - Photonic devices
KW - Rectangular microresonators
KW - Silicon-on-insulator
UR - http://www.scopus.com/inward/record.url?scp=85030868525&partnerID=8YFLogxK
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U2 - 10.3390/photonics4020034
DO - 10.3390/photonics4020034
M3 - Article
AN - SCOPUS:85030868525
VL - 4
JO - Photonics
JF - Photonics
SN - 2304-6732
IS - 2
M1 - 34
ER -