Evanescently coupled rectangular microresonators in silicon-on-insulator with high Q-values: Experimental characterization

Manuel Mendez Astudillo, Hideaki Okayama, Hirochika Nakajima

    研究成果: Article査読

    4 被引用数 (Scopus)

    抄録

    We report on evanescently coupled rectangular microresonators with dimensions up to 20 × 10 μm2 in silicon-on-insulator in an add-drop filter configuration. The influence of the geometrical parameters of the device was experimentally characterized and a high Q value of 13,000 was demonstrated as well as the multimode optical resonance characteristics in the drop port. We also show a 95% energy transfer between ports when the device is operated in TM-polarization and determine the full symmetry of the device by using an eight-port configuration, allowing the drop waveguide to be placed on any of its sides, providing a way to filter and route optical signals. We used the FDTD method to analyze the device and e-beam lithography and dry etching techniques for fabrication.

    本文言語English
    論文番号34
    ジャーナルPhotonics
    4
    2
    DOI
    出版ステータスPublished - 2017 6 1

    ASJC Scopus subject areas

    • Radiology Nuclear Medicine and imaging
    • Instrumentation
    • Atomic and Molecular Physics, and Optics

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