TY - GEN
T1 - Experimental and theoretical investigations of enhanced electromechanical properties in YbAlN and YbGaN films
AU - Li, Song
AU - Jia, Junjun
AU - Iwata, Naoya
AU - Yanagitani, Takahiko
N1 - Funding Information:
ACKNOWLEDGMENT This work was supported by JST CREST (No. JPMJCR20Q1), JST FOREST, and KAKENHI (Grant-in-Aid for Scientific Research B, No.19H02202, No.21K18734).J. Jia acknowledges the funding from JSPS KAKENHI Grant-in-Aid for Scientific Research (C) (Grant No. 20K05368), Japan.
Publisher Copyright:
© 2022 IEEE.
PY - 2022
Y1 - 2022
N2 - Epitaxial YbAlN, YbGaN and ScAlN films were successfully fabricated by magnetron sputtering. The electromechanical coupling coefficient is 4.5% in the epitaxial Sc0.03Al0.97N film and reaches to 4.8% in the epitaxial Yb0.27Al0.73N film. Compare with the polycrystalline films, the epitaxial YbGaN films show a higher k-{t}{2}, close to the theoretical values calculated by first principles calculations, especially at high doping Yb concentrations. This suggests that the use of epitaxial piezoelectric films in the resonator is a feasible approach to improve the performance of frequency filters.
AB - Epitaxial YbAlN, YbGaN and ScAlN films were successfully fabricated by magnetron sputtering. The electromechanical coupling coefficient is 4.5% in the epitaxial Sc0.03Al0.97N film and reaches to 4.8% in the epitaxial Yb0.27Al0.73N film. Compare with the polycrystalline films, the epitaxial YbGaN films show a higher k-{t}{2}, close to the theoretical values calculated by first principles calculations, especially at high doping Yb concentrations. This suggests that the use of epitaxial piezoelectric films in the resonator is a feasible approach to improve the performance of frequency filters.
KW - electromechanical coupling coefficient
KW - epitaxial film
KW - YbAlN
KW - YbGaN
UR - http://www.scopus.com/inward/record.url?scp=85143765676&partnerID=8YFLogxK
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U2 - 10.1109/IUS54386.2022.9958325
DO - 10.1109/IUS54386.2022.9958325
M3 - Conference contribution
AN - SCOPUS:85143765676
T3 - IEEE International Ultrasonics Symposium, IUS
BT - IUS 2022 - IEEE International Ultrasonics Symposium
PB - IEEE Computer Society
T2 - 2022 IEEE International Ultrasonics Symposium, IUS 2022
Y2 - 10 October 2022 through 13 October 2022
ER -