Extraction of kt2 of piezoelectric film/substrate structure by conversion loss derived by electromagnetic signal including no acoustic losses

Ryota Tatsumi, Takahiko Yanagitani

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

Electromechanical coupling coefficient (kt2) is an important parameter for determining the performances of RF BAW filters. According to the IEEE standard, the resonance-antiresonance method for a self-standing film structure is recommended to determine kt2 of the piezoelectric film. It is convenient and cost-effective to determine the kt2 from the film/wafer structure or epitaxial wafers. However, kt2 is underestimated due to the acoustic losses in the substrate in the conventional conversion loss method, which is powerful tool to extract the kt2 from HBAR. In this study, we introduce the conversion loss using electromagnetic signal including no acoustic losses.

本文言語English
ホスト出版物のタイトルIUS 2020 - International Ultrasonics Symposium, Proceedings
出版社IEEE Computer Society
ISBN(電子版)9781728154480
DOI
出版ステータスPublished - 2020 9 7
イベント2020 IEEE International Ultrasonics Symposium, IUS 2020 - Las Vegas, United States
継続期間: 2020 9 72020 9 11

出版物シリーズ

名前IEEE International Ultrasonics Symposium, IUS
2020-September
ISSN(印刷版)1948-5719
ISSN(電子版)1948-5727

Conference

Conference2020 IEEE International Ultrasonics Symposium, IUS 2020
国/地域United States
CityLas Vegas
Period20/9/720/9/11

ASJC Scopus subject areas

  • 音響学および超音波学

フィンガープリント

「Extraction of kt2 of piezoelectric film/substrate structure by conversion loss derived by electromagnetic signal including no acoustic losses」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル