抄録
Monitoring motion parameters is increasingly important in automotive applications and robotics. A silicon micromachined structure 1 cm × 2 cm in size has been designed and fabricated, which can detect linear acceleration g and angular rate ω simultaneously and independently. This is accomplished by capacitive detection of (a) the displacement due to acceleration and (b) the tilt due to centrifugal forces of two seismic masses symmetrically suspended by torsion bars. The ratio of the respective sensitivities to acceleration g and angular rate ω can be adjusted through the dimensions and the shape of the torsion bars.
本文言語 | English |
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ページ(範囲) | 646-650 |
ページ数 | 5 |
ジャーナル | Sensors and Actuators, A: Physical |
巻 | 54 |
号 | 1-3 |
DOI | |
出版ステータス | Published - 1996 6月 |
外部発表 | はい |
ASJC Scopus subject areas
- 電子材料、光学材料、および磁性材料
- 器械工学
- 凝縮系物理学
- 表面、皮膜および薄膜
- 金属および合金
- 電子工学および電気工学