抄録
Monitoring motion parameters is increasingly important in automotive applications and robotics. A silicon micromachined structure 1 cm × 2 cm in size has been designed and fabricated, which can detect linear acceleration g and angular rate ω simultaneously and independently. This is accomplished by capacitive detection of (a) the displacement due to acceleration and (b) the tilt due to centrifugal forces of two seismic masses symmetrically suspended by torsion bars. The ratio of the respective sensitivities to acceleration g and angular rate ω can be adjusted through the dimensions and the shape of the torsion bars.
| 元の言語 | English |
|---|---|
| ページ（範囲） | 646-650 |
| ページ数 | 5 |
| ジャーナル | Sensors and Actuators, A: Physical |
| 巻 | 54 |
| 発行部数 | 1-3 |
| 出版物ステータス | Published - 1996 6 |
| 外部発表 | Yes |
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ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Mechanical Engineering
- Instrumentation
これを引用
Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate. / Mizuno, Jun; Nottmeyer, Kay; Cabuz, Cleopatra; Minami, Kazuyuki; Kobayashi, Takashi; Esashi, Masayoshi.
：: Sensors and Actuators, A: Physical, 巻 54, 番号 1-3, 06.1996, p. 646-650.研究成果: Article
}
TY - JOUR
T1 - Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate
AU - Mizuno, Jun
AU - Nottmeyer, Kay
AU - Cabuz, Cleopatra
AU - Minami, Kazuyuki
AU - Kobayashi, Takashi
AU - Esashi, Masayoshi
PY - 1996/6
Y1 - 1996/6
N2 - Monitoring motion parameters is increasingly important in automotive applications and robotics. A silicon micromachined structure 1 cm × 2 cm in size has been designed and fabricated, which can detect linear acceleration g and angular rate ω simultaneously and independently. This is accomplished by capacitive detection of (a) the displacement due to acceleration and (b) the tilt due to centrifugal forces of two seismic masses symmetrically suspended by torsion bars. The ratio of the respective sensitivities to acceleration g and angular rate ω can be adjusted through the dimensions and the shape of the torsion bars.
AB - Monitoring motion parameters is increasingly important in automotive applications and robotics. A silicon micromachined structure 1 cm × 2 cm in size has been designed and fabricated, which can detect linear acceleration g and angular rate ω simultaneously and independently. This is accomplished by capacitive detection of (a) the displacement due to acceleration and (b) the tilt due to centrifugal forces of two seismic masses symmetrically suspended by torsion bars. The ratio of the respective sensitivities to acceleration g and angular rate ω can be adjusted through the dimensions and the shape of the torsion bars.
KW - Accelerometers
KW - Angular rate sensors
KW - Bulk micromachining
KW - Silicon
UR - http://www.scopus.com/inward/record.url?scp=24944461460&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=24944461460&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:24944461460
VL - 54
SP - 646
EP - 650
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
SN - 0924-4247
IS - 1-3
ER -