Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate

Jun Mizuno*, Kay Nottmeyer, Cleopatra Cabuz, Takashi Kobayashi, Masayoshi Esashi

*この研究の対応する著者

研究成果査読

4 被引用数 (Scopus)

抄録

A silicon micromachined structure 1 cm × 2 cm in size was designed and fabricated, which can detect linear acceleration g and angular rate ω simultaneously and independently. This is accomplished by capacitive detection of a) the displacement due to acceleration and b) the tilt due to centrifugal forces of two seismic masses symmetrically suspended by torsion bars. The ratio of the respective sensitivities to acceleration g and angular rate ω can be adjusted through the dimensions and the shape of the torsion bars.

本文言語English
ページ679-682
ページ数4
出版ステータスPublished - 1995
外部発表はい
イベントProceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden
継続期間: 1995 6 251995 6 29

Other

OtherProceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)
CityStockholm, Sweden
Period95/6/2595/6/29

ASJC Scopus subject areas

  • 工学(全般)

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