Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate

Jun Mizuno, Kay Nottmeyer, Cleopatra Cabuz, Takashi Kobayashi, Masayoshi Esashi

研究成果: Paper

3 引用 (Scopus)

抜粋

A silicon micromachined structure 1 cm × 2 cm in size was designed and fabricated, which can detect linear acceleration g and angular rate ω simultaneously and independently. This is accomplished by capacitive detection of a) the displacement due to acceleration and b) the tilt due to centrifugal forces of two seismic masses symmetrically suspended by torsion bars. The ratio of the respective sensitivities to acceleration g and angular rate ω can be adjusted through the dimensions and the shape of the torsion bars.

元の言語English
ページ679-682
ページ数4
出版物ステータスPublished - 1995 12 1
外部発表Yes
イベントProceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden
継続期間: 1995 6 251995 6 29

Other

OtherProceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)
Stockholm, Sweden
期間95/6/2595/6/29

ASJC Scopus subject areas

  • Engineering(all)

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  • これを引用

    Mizuno, J., Nottmeyer, K., Cabuz, C., Kobayashi, T., & Esashi, M. (1995). Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate. 679-682. 論文発表場所 Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), Stockholm, Sweden, .