Fabrication and evaluation of freestanding stretchable nanosheet for optical MEMS application

Hayato Kumagai, Kazuaki Sawada, Kazuhiro Takahashi, Nobutaka Sato, Shinji Takeoka, Toshinori Fujie

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

We developed a stretchable freestanding ultra-thin sheet composed by poly(styrene-butadiene-styrene) (SBS) and evaluated its optomechanical properties. The freestanding SBS sheet with a thickness of 675 nm was formed above a through hole of a PDMS sheet. Deflection of the freestanding sheet with a size of 10.4 mm × 10.4 mm was found to be 50 nm by optical surface profiler. In evaluation of the sheet stretch measured by reflection spectra of a thin-film interference peak, SBS nanosheet revealed about 38% of elastic strain. This result demonstrated that the SBS nanosheet is stretchable even though its thickness is one order magnitude of thinner than PDMS.

本文言語English
ホスト出版物のタイトル2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings
出版社IEEE Computer Society
2016-September
ISBN(電子版)9781509010356
DOI
出版ステータスPublished - 2016 9 13
イベント21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Singapore, Singapore
継続期間: 2016 7 312016 8 4

Other

Other21st International Conference on Optical MEMS and Nanophotonics, OMN 2016
国/地域Singapore
CitySingapore
Period16/7/3116/8/4

ASJC Scopus subject areas

  • ハードウェアとアーキテクチャ
  • 電子工学および電気工学
  • 電子材料、光学材料、および磁性材料

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