Fabrication of a polymer high-aspect-ratio pillar array using UV imprinting

Hidetoshi Shinohara*, Hiroshi Goto, Takashi Kasahara, Jun Mizuno

*この研究の対応する著者

研究成果: Article査読

7 被引用数 (Scopus)

抄録

This paper presents UV imprinting methods for fabricating a high-aspect-ratio pillar array. A polydimethylsiloxane (PDMS) mold was selected as the UV imprinting mold. The pillar pattern was formed on a 50 × 50 mm2 area on a polyethylene terephthalate (PET) film without remarkable deformation. The aspect ratios of the pillar and space were about four and ten, respectively. The mold was placed into contact with a UV-curable resin under a reduced pressure, and the resin was cured by UV light irradiation after exposure to atmospheric pressure. The PDMS mold showed good mold releasability and high flexibility. By moderately pressing the mold before UV-curing, the thickness of the residual layer of the imprinted resin was reduced and the pattern was precisely imprinted. Both batch pressing and roll pressing are available.

本文言語English
ページ(範囲)157-167
ページ数11
ジャーナルMicromachines
4
2
DOI
出版ステータスPublished - 2013

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 機械工学
  • 電子工学および電気工学

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