FABRICATION OF a-Si: H FILMS BY COAXIAL LINE TYPE MICROWAVE HYDROGEN PLASMA CVD.

Isamu Kato, Tetsuya Ueda, Kazuhisa Hatanaka

研究成果: Article査読

1 被引用数 (Scopus)

抄録

A double tubed coaxial line type microwave plasma CVD system has been developed for a-Si:H film deposition using hydrogen and argon gases with pure SiH//4 gas as the material gas. The film quality was evaluated as a function of the plasma condition. A high-quality film can be fabricated under hydrogen plasma because a large amount of hydrogen radicals covers the film surface, thereby causing a thermal structural relaxation of silane radicals. This relaxation results when the silane radicals increase their surface mobility after the soft landing on the film surface.

本文言語English
ページ(範囲)73-84
ページ数12
ジャーナルElectronics and Communications in Japan, Part II: Electronics (English translation of Denshi Tsushin Gakkai Ronbunshi)
70
11
出版ステータスPublished - 1987 11

ASJC Scopus subject areas

  • 電子工学および電気工学

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