Fabrication of AFM probe with CuO nanowire formed by stress-induced method

Atsushi Hosoi, Hisataka Koto, Yang Ju

    研究成果: Article

    抄録

    A novel method has been proposed to fabricate an atomic force microscope (AFM) probe using CuO nanowire and a stress-induced method that can form the nanowire easily. By heating a commercial AFM probe with a film coating of Ta and Cu, a Cu hillock with CuO nanowires on its surface could be formed at the end of the probe. The thickness of the coating films, the heating temperature, and the heating time were investigated to obtain CuO nanowires with a high aspect ratio for use as an AFM probe tip. It was found that a suitable probe tip can be fabricated using the a Cu film thickness of 700 nm, a heating temperature of 380 °C and a heating time of 6 h. Probe tips (~5 μm high) and nanowires of ~25 nm diameter were obtained successfully. In the range evaluated, the measurement resolution of the CuO nanowire probe was slightly worse than that of a commercial AFM probe. However, both probes had almost the same dimensional measurement precision.

    元の言語English
    ページ(範囲)2221-2229
    ページ数9
    ジャーナルMicrosystem Technologies
    20
    発行部数12
    DOI
    出版物ステータスPublished - 2014 9 11

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    Nanowires
    Microscopes
    nanowires
    microscopes
    Fabrication
    fabrication
    probes
    Heating
    heating
    coatings
    Coatings
    dimensional measurement
    high aspect ratio
    Film thickness
    Aspect ratio
    film thickness
    Temperature
    temperature

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Hardware and Architecture
    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics

    これを引用

    Fabrication of AFM probe with CuO nanowire formed by stress-induced method. / Hosoi, Atsushi; Koto, Hisataka; Ju, Yang.

    :: Microsystem Technologies, 巻 20, 番号 12, 11.09.2014, p. 2221-2229.

    研究成果: Article

    Hosoi, Atsushi ; Koto, Hisataka ; Ju, Yang. / Fabrication of AFM probe with CuO nanowire formed by stress-induced method. :: Microsystem Technologies. 2014 ; 巻 20, 番号 12. pp. 2221-2229.
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