Fabrication of fine plastic microchannel by using hot embossing

M. Ishizuka; J. Mizuno; T. Harada; S. Shoji

Fabrication of fine plastic microchannel by using hot embossing

M. Ishizuka, J. Mizuno, T. Harada, S. Shoji

研究成果: Paper › 査読

抄録

Fine plastic micorchannels were fabricated by hot embossing of PMMA substrates. To realize rectangular cross sectional channel structure, silicon molds having ridge structures fabricated by Deep-RIE was employed. The hot embossing condition such as the temperature, applied pressure and time was also carefully optimized. The embossing technique was also applied for the fabrication of other plastic microchannels such as fluororesin.

本文言語	English
ページ	303-307
ページ数	5
出版ステータス	Published - 2004 12 1
イベント	Microfabricated Systems and MEMS VII - Proceedings of the International Symposium - Honolulu, HI, United States 継続期間: 2004 10 3 → 2004 10 8

Conference

Conference	Microfabricated Systems and MEMS VII - Proceedings of the International Symposium
Country	United States
City	Honolulu, HI
Period	04/10/3 → 04/10/8

ASJC Scopus subject areas

Engineering(all)

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引用スタイル

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abstract = "Fine plastic micorchannels were fabricated by hot embossing of PMMA substrates. To realize rectangular cross sectional channel structure, silicon molds having ridge structures fabricated by Deep-RIE was employed. The hot embossing condition such as the temperature, applied pressure and time was also carefully optimized. The embossing technique was also applied for the fabrication of other plastic microchannels such as fluororesin.",

author = "M. Ishizuka and J. Mizuno and T. Harada and S. Shoji",

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AU - Ishizuka, M.

AU - Mizuno, J.

AU - Harada, T.

AU - Shoji, S.

PY - 2004/12/1

Y1 - 2004/12/1

N2 - Fine plastic micorchannels were fabricated by hot embossing of PMMA substrates. To realize rectangular cross sectional channel structure, silicon molds having ridge structures fabricated by Deep-RIE was employed. The hot embossing condition such as the temperature, applied pressure and time was also carefully optimized. The embossing technique was also applied for the fabrication of other plastic microchannels such as fluororesin.

AB - Fine plastic micorchannels were fabricated by hot embossing of PMMA substrates. To realize rectangular cross sectional channel structure, silicon molds having ridge structures fabricated by Deep-RIE was employed. The hot embossing condition such as the temperature, applied pressure and time was also carefully optimized. The embossing technique was also applied for the fabrication of other plastic microchannels such as fluororesin.

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T2 - Microfabricated Systems and MEMS VII - Proceedings of the International Symposium

Y2 - 3 October 2004 through 8 October 2004

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