Fabrication of fine plastic microchannel by using hot embossing

M. Ishizuka*, J. Mizuno, T. Harada, S. Shoji

*この研究の対応する著者

研究成果: Paper査読

抄録

Fine plastic micorchannels were fabricated by hot embossing of PMMA substrates. To realize rectangular cross sectional channel structure, silicon molds having ridge structures fabricated by Deep-RIE was employed. The hot embossing condition such as the temperature, applied pressure and time was also carefully optimized. The embossing technique was also applied for the fabrication of other plastic microchannels such as fluororesin.

本文言語English
ページ303-307
ページ数5
出版ステータスPublished - 2004 12 1
イベントMicrofabricated Systems and MEMS VII - Proceedings of the International Symposium - Honolulu, HI, United States
継続期間: 2004 10 32004 10 8

Conference

ConferenceMicrofabricated Systems and MEMS VII - Proceedings of the International Symposium
国/地域United States
CityHonolulu, HI
Period04/10/304/10/8

ASJC Scopus subject areas

  • 工学(全般)

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