Fine plastic micorchannels were fabricated by hot embossing of PMMA substrates. To realize rectangular cross sectional channel structure, silicon molds having ridge structures fabricated by Deep-RIE was employed. The hot embossing condition such as the temperature, applied pressure and time was also carefully optimized. The embossing technique was also applied for the fabrication of other plastic microchannels such as fluororesin.
|出版ステータス||Published - 2004 12 1|
|イベント||Microfabricated Systems and MEMS VII - Proceedings of the International Symposium - Honolulu, HI, United States|
継続期間: 2004 10 3 → 2004 10 8
|Conference||Microfabricated Systems and MEMS VII - Proceedings of the International Symposium|
|Period||04/10/3 → 04/10/8|
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