@article{252d46aa538e43bda86152d26cff86ba,
title = "Fabrication of heteroepitaxial diamond thin films on Ir(001)/MgO(001) substrates using antenna-edge-type microwave plasma-assisted chemical vapor deposition",
abstract = "Diamond heteroepitaxial thin films were successfully synthesized on high-quality Ir(001)/MgO(001) substrates. In bias-enhanced nucleation, antenna-edge-type microwave plasma-assisted chemical vapor deposition (MPCVD) was used. Subsequently, the <001> selective and smoothing growth processes were conducted by conventional MPCVD. Reconstructed (2×1) structure patterns have been observed by reflection high-energy electron diffraction (RHEED), which indicated that the surface of the diamond film is very smooth. The mean roughness is less than 2 nm in a 10-μm2 area, as revealed by atomic force microscopy observations.",
keywords = "Chemical vapor deposition, Diamond, Heteroepitaxy, Iridium",
author = "Toyokatsu Fujisaki and Minoru Tachiki and Norikazu Taniyama and Minoru Kudo and Hiroshi Kawarada",
note = "Funding Information: The authors would like to thank Dr T. Ishikura of Tokyo Gas Co Ltd for lending us the RHEED apparatus. The authors also would like to thank Dr P. Koidl, Dr C. Wild, and Dr N. Herres of the Fraunhofer Institute for Applied Solid-State Physics for carrying out rocking curve measurements in X-ray diffraction analysis and making the back contact coating for the Ir/MgO substrates. This work was supported by a Grant-in-Aid for Center of Excellence (COE) Research from the Ministry of Education, Culture, Sports, Science and Technology. This work is also supported in part by Advanced Research Institute for Science and Engineering, Waseda University.",
year = "2002",
month = mar,
doi = "10.1016/S0925-9635(01)00654-9",
language = "English",
volume = "11",
pages = "478--481",
journal = "Diamond and Related Materials",
issn = "0925-9635",
publisher = "Elsevier BV",
number = "3-6",
}