TY - GEN
T1 - Fabrication of high kt2and k' 352Sc0.4A10.6N thin films by RF magnetron sputtering
AU - Shimizu, Yuki
AU - Yanagitani, Takahiko
N1 - Funding Information:
ACKNOWLEDGMENT This work was supported by the JST CREST (No. JPMJCR20Q1), JST FOREST, and KAKENHI (Grant-in-Aid for Scientific Research No.19H02202, and No.21K18734).
Publisher Copyright:
© 2022 IEEE.
PY - 2022
Y1 - 2022
N2 - Scandium aluminum nitride (ScAlN) films are commercially used for RF filter application owing to their large thickness extensional mode electromechanical coupling coefficient k-{ mathrm{t}}{} {2}. In addition, c-axis tilted ScAlN films are good candidates for biosensors and gyro-sensors because of their high quasi thickness shear mode k-{35 {2}} { prime}. In this study, we fabricated c-axis oriented (0001) Sco.4Alo.6N thin film and c-axis 34° tilted Sco.4Alo.6N thin film by RF magnetron sputtering. k-{ mathrm{t}}{} {2} of the c-axis oriented (0001) Sco.4Alo.6N film was evaluated to be 21.4% by CL method and approximately 28% by other four kinds of k-{ mathrm{t}}{} {2} estimation methods. k-{35 {2}} { prime} of the c-axis tilted Sc0.4Al0.6N film was evaluated to be at least 22.9%. These high k-{ mathrm{t}}{} {2} and k-{35 {2}} { prime} of the Sco.4Alo.6N thin films can be attributed to the high crystalline orientation and the suppression of abnormally oriented grains (AOGs) at high Sc concentration.
AB - Scandium aluminum nitride (ScAlN) films are commercially used for RF filter application owing to their large thickness extensional mode electromechanical coupling coefficient k-{ mathrm{t}}{} {2}. In addition, c-axis tilted ScAlN films are good candidates for biosensors and gyro-sensors because of their high quasi thickness shear mode k-{35 {2}} { prime}. In this study, we fabricated c-axis oriented (0001) Sco.4Alo.6N thin film and c-axis 34° tilted Sco.4Alo.6N thin film by RF magnetron sputtering. k-{ mathrm{t}}{} {2} of the c-axis oriented (0001) Sco.4Alo.6N film was evaluated to be 21.4% by CL method and approximately 28% by other four kinds of k-{ mathrm{t}}{} {2} estimation methods. k-{35 {2}} { prime} of the c-axis tilted Sc0.4Al0.6N film was evaluated to be at least 22.9%. These high k-{ mathrm{t}}{} {2} and k-{35 {2}} { prime} of the Sco.4Alo.6N thin films can be attributed to the high crystalline orientation and the suppression of abnormally oriented grains (AOGs) at high Sc concentration.
KW - electromechanical coupling coefficient
KW - HBAR
KW - piezoelectric film
KW - scandium aluminum nitride
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U2 - 10.1109/IUS54386.2022.9957523
DO - 10.1109/IUS54386.2022.9957523
M3 - Conference contribution
AN - SCOPUS:85143835904
T3 - IEEE International Ultrasonics Symposium, IUS
BT - IUS 2022 - IEEE International Ultrasonics Symposium
PB - IEEE Computer Society
T2 - 2022 IEEE International Ultrasonics Symposium, IUS 2022
Y2 - 10 October 2022 through 13 October 2022
ER -