In this paper, a PMMA (poly-methyl methacrylate) microchip, which has shallow dams of about 5 μm gaps, was fabricated and evaluated. Accurate dimension control of the micro-channels was realized by not only optimizing hot embossing conditions but also employing low temperature plasma activated bonding.
|出版ステータス||Published - 2006 1 1|
|イベント||10th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2006 - Tokyo, Japan|
継続期間: 2006 11 5 → 2006 11 9
|Conference||10th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2006|
|Period||06/11/5 → 06/11/9|
ASJC Scopus subject areas
- Chemical Engineering (miscellaneous)