Fabrication of highly dimension controlled PMMA microchip by hot embossing and low temperature direct bonding

Hidetoshi Shinohara, Jun Mizuno, Fumihiko Kitagawa, Koji Otsuka, Shuichi Shoji

研究成果: Paper査読

3 被引用数 (Scopus)

抄録

In this paper, a PMMA (poly-methyl methacrylate) microchip, which has shallow dams of about 5 μm gaps, was fabricated and evaluated. Accurate dimension control of the micro-channels was realized by not only optimizing hot embossing conditions but also employing low temperature plasma activated bonding.

本文言語English
ページ158-160
ページ数3
出版ステータスPublished - 2006 1 1
イベント10th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2006 - Tokyo, Japan
継続期間: 2006 11 52006 11 9

Conference

Conference10th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2006
国/地域Japan
CityTokyo
Period06/11/506/11/9

ASJC Scopus subject areas

  • 化学工学(その他)
  • バイオエンジニアリング

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