Fabrication of low dislocation density GaN template by nano-channel FIELO communication using nanoimprint lithography

Akiko Okada, Shuichi Shoji, Hidetoshi Shinohara, Hiromi Nishihara, Hiroshi Goto, Haruo Sunakawa, Toshiharu Matsueda, Akira Usui, Atsushi A. Yamaguchi, Jun Mizuno

研究成果: Article

5 引用 (Scopus)
元の言語English
ページ(範囲)69-72
ページ数4
ジャーナルJournal of Photopolymer Science and Technology
26
発行部数1
DOI
出版物ステータスPublished - 2013 8 2

ASJC Scopus subject areas

  • Polymers and Plastics
  • Organic Chemistry
  • Materials Chemistry

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