Fabrication of microchannel-TEM grid for in situ liquid observation of interfacial chemical reaction

K. Miwa, Hiroyuki Kuwae, K. Sakamoto, Shuichi Shoji, Jun Mizuno

研究成果: Conference contribution

抜粋

We developed a novel microchannel-TEM grid that enables observation of interfacial biochemical reactions. A Y-shaped microchannel, which was sandwiched between two alumina membranes, realizes observation of interfacial reactions by lamellar flow. Reliable sealing of the microchannel was achieved by highly stable Al2O3/SU-8 bonding of 2.90 MPa at 180 °C. TEM images indicate the TEM grid has sufficient electron transparency and it was successfully fabricated without microchannel distortion. These results suggest that proposed TEM grid will become a powerful tool for revealing mechanisms of chemical reactions.

元の言語English
ホスト出版物のタイトル2018 International Conference on Electronics Packaging and iMAPS All Asia Conference, ICEP-IAAC 2018
出版者Institute of Electrical and Electronics Engineers Inc.
ページ284-287
ページ数4
ISBN(電子版)9784990218850
DOI
出版物ステータスPublished - 2018 6 6
イベント2018 International Conference on Electronics Packaging and iMAPS All Asia Conference, ICEP-IAAC 2018 - Kuwana, Mie, Japan
継続期間: 2018 4 172018 4 21

Other

Other2018 International Conference on Electronics Packaging and iMAPS All Asia Conference, ICEP-IAAC 2018
Japan
Kuwana, Mie
期間18/4/1718/4/21

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Polymers and Plastics

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  • これを引用

    Miwa, K., Kuwae, H., Sakamoto, K., Shoji, S., & Mizuno, J. (2018). Fabrication of microchannel-TEM grid for in situ liquid observation of interfacial chemical reaction. : 2018 International Conference on Electronics Packaging and iMAPS All Asia Conference, ICEP-IAAC 2018 (pp. 284-287). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.23919/ICEP.2018.8374305