Fabrication of microstructured copper on an indium-tin-oxide surface using a micropatterned self-assembled monolayer as a template

Shuuichi Asakura*, Mitsuhito Hirota, Akio Fuwa

*この研究の対応する著者

    研究成果: Article査読

    9 被引用数 (Scopus)

    抄録

    An ODS-SAM was successfully formed onto an ITO surface by CVD. The originally hydrophilic surface became highly hydrophobic with maximum water-contact angle reaching about 120°C. The final contact angles of the ODS-SAMs depended significantly on CVD temperature and treatment time. The surface hydrophobicity of ODS-SAM samples deposited at 100 and 150°C was superior to that of a sample treated at 50°C. It was determined that the CVD temperature of 150°C is optimum for ODS-SAM preparation.

    本文言語English
    ページ(範囲)1152-1156
    ページ数5
    ジャーナルJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
    21
    4
    DOI
    出版ステータスPublished - 2003 7月

    ASJC Scopus subject areas

    • 表面、皮膜および薄膜
    • 表面および界面
    • 物理学および天文学(その他)

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