Fabrication of multi-pixel TES microcalorimeters with an electrodeposited Sn absorber and Bi absorber

T. Arakawa, H. Kudo, H. Sato, H. Kobayashi, T. Izumi, S. Ohtsuka, K. Mori, S. Shoji, T. Osaka, T. Homma, K. Mitsuda, N. Yamasaki, R. Fujimoto, N. Iyomoto, T. Oshima, K. Futamoto, Y. Takei, T. Ichitsubo, T. Fujimori, K. YoshidaY. Ishisaki, U. Morita, T. Koga, K. Shinozaki, K. Sato, N. Takai, T. Ohashi, Y. Kuroda, M. Onishi, M. Goto, F. Beppu

研究成果: Article

3 引用 (Scopus)

抜粋

We have developed multi-pixel TES microcalorimeters in order to realize high-energy resolution and X-ray imaging. A Sn absorber and a Bi absorber were formed on Si3N4 and SiO2 membrane using two-step exposure photolithography and electrodeposition. A FEM analysis was carried out to investigate the performance of the X-ray microabsorbers. In addition, a superconducting through-wafer interconnection was demonstrated considering the future X-ray imager using microcalorimeters. Detail of the fabrication techniques, characteristics and simulation results of two types of the microabsorbers, as well as those of the calorimeters are described.

元の言語English
ページ(範囲)456-459
ページ数4
ジャーナルNuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
520
発行部数1-3
DOI
出版物ステータスPublished - 2004 3 11

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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    Arakawa, T., Kudo, H., Sato, H., Kobayashi, H., Izumi, T., Ohtsuka, S., Mori, K., Shoji, S., Osaka, T., Homma, T., Mitsuda, K., Yamasaki, N., Fujimoto, R., Iyomoto, N., Oshima, T., Futamoto, K., Takei, Y., Ichitsubo, T., Fujimori, T., ... Beppu, F. (2004). Fabrication of multi-pixel TES microcalorimeters with an electrodeposited Sn absorber and Bi absorber. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 520(1-3), 456-459. https://doi.org/10.1016/j.nima.2003.11.371