TY - GEN
T1 - Fabrication of nano-sized single-walled carbon nanotube vias for electronic device applications
AU - Iwasaki, T.
AU - Morikane, R.
AU - Zhong, G.
AU - Edura, T.
AU - Tsutsui, K.
AU - Wada, Y.
AU - Kawarada, H.
PY - 2006
Y1 - 2006
N2 - Vertically aligned single-walled carbon nanotubes (SWNTs) were synthesized at a low temperature of 600°C by radical chemical vapor deposition (CVD). For applying this technique to electronic devices, we synthesized SWNTs in nano-sized SiO2 holes to fabricate SWNT-vias, which is expected to be used for multi-layer interconnects and vertically aligned field effect transistors (FET). SWNTs were grown in holes with various sizes and shapes patterned by electron beam lithography. We also show the concept of large area deposition of vertically aligned SWNTs by improved radical CVD system.
AB - Vertically aligned single-walled carbon nanotubes (SWNTs) were synthesized at a low temperature of 600°C by radical chemical vapor deposition (CVD). For applying this technique to electronic devices, we synthesized SWNTs in nano-sized SiO2 holes to fabricate SWNT-vias, which is expected to be used for multi-layer interconnects and vertically aligned field effect transistors (FET). SWNTs were grown in holes with various sizes and shapes patterned by electron beam lithography. We also show the concept of large area deposition of vertically aligned SWNTs by improved radical CVD system.
KW - Nano-sized via
KW - Radical chemical vapor deposition
KW - Single-walled carbon nanotubes
KW - Vertically aligned
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UR - http://www.scopus.com/inward/citedby.url?scp=33845209151&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:33845209151
SN - 0976798565
SN - 9780976798569
T3 - 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings
SP - 94
EP - 97
BT - 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings
T2 - 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings
Y2 - 7 May 2006 through 11 May 2006
ER -