Fabrication of on-chip fuel cells on polymer substrates

Satoshi Tominaka*, Hiroshi Nishizeko, Hidetoshi Shinohara, Jun Mizuno, Tetsuya Osaka

*この研究の対応する著者

研究成果: Conference contribution

抄録

Here we report fabrication of tiny on-chip fuel cells on polymer films. Since on-chip cells which we have so far fabricated on silicon substrates through a series of microfabrication procedures are of a simple microchannel-based design, their fabrication on a polymer substrate by molding is attractive in terms of the rapid fabrication and of the inexpensive fabrication procedures and materials. To do so, a nickel mold was first prepared by electroplating from the conventional silicon-based cell, i.e., a master, and then the cell was replicated on cycloolefin polymer films by hot embossing. The microchannel thus replicated on the polymer film was confirmed to be almost identical to the silicon master by observation with a confocal microscope. Finally, Au current collectors sufficiently adhesive to the polymer were successfully deposited after the surface modification by an oxygen plasma treatment.

本文言語English
ホスト出版物のタイトルECS Transactions -Proton Exchange Membrane Fuel Cells 9
ページ1961-1969
ページ数9
1 PART 2
DOI
出版ステータスPublished - 2009 12 1
イベント9th Proton Exchange Membrane Fuel Cell Symposium (PEMFC 9) - 216th Meeting of the Electrochemical Society - Vienna, Austria
継続期間: 2009 10 42009 10 9

出版物シリーズ

名前ECS Transactions
番号1 PART 2
25
ISSN(印刷版)1938-5862
ISSN(電子版)1938-6737

Conference

Conference9th Proton Exchange Membrane Fuel Cell Symposium (PEMFC 9) - 216th Meeting of the Electrochemical Society
国/地域Austria
CityVienna
Period09/10/409/10/9

ASJC Scopus subject areas

  • 工学(全般)

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