Fabrication of plate-laminated waveguide for 350GHz band by silicon process

Jiro Hirokawa, Satoshi Suetsugu, Yusuke Minamikata, Tadao Nagatsuma, Hiroyuki Seto, Yoshiyuki Inoue, Mikiko Saito

研究成果: Conference contribution

抄録

This paper presents the fabrication of plate-laminated waveguides and cavities for 350GHz band by silicon process where the tolerance is less than several μm. We measure the transmission loss of the waveguide and the Q factors of the cavities, and then estimate the equivalent conductivity. We will also fabricate the plate-laminated waveguide slot array antennas (Y.Miura, J.Hirokawa et al., IEEE Trans. Antennas Propagat., 59, 2011, pp.2844-2851) and show the measured results in the conference.

本文言語English
ホスト出版物のタイトル2015 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015
出版社Institute of Electrical and Electronics Engineers Inc.
ISBN(電子版)9789090086286
DOI
出版ステータスPublished - 2015 10 21
イベント1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015 - Gran Canaria, Spain
継続期間: 2015 5 162015 5 24

出版物シリーズ

名前2015 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015

Other

Other1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015
国/地域Spain
CityGran Canaria
Period15/5/1615/5/24

ASJC Scopus subject areas

  • 通信
  • コンピュータ ネットワークおよび通信

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