Fabrication of plate-laminated waveguide for 350GHz band by silicon process

Jiro Hirokawa, Satoshi Suetsugu, Yusuke Minamikata, Tadao Nagatsuma, Hiroyuki Seto, Yoshiyuki Inoue, Mikiko Saito

研究成果: Conference contribution

抜粋

This paper presents the fabrication of plate-laminated waveguides and cavities for 350GHz band by silicon process where the tolerance is less than several μm. We measure the transmission loss of the waveguide and the Q factors of the cavities, and then estimate the equivalent conductivity. We will also fabricate the plate-laminated waveguide slot array antennas (Y.Miura, J.Hirokawa et al., IEEE Trans. Antennas Propagat., 59, 2011, pp.2844-2851) and show the measured results in the conference.

元の言語English
ホスト出版物のタイトル2015 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015
出版者Institute of Electrical and Electronics Engineers Inc.
ISBN(印刷物)9789090086286
DOI
出版物ステータスPublished - 2015 10 21
イベント1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015 - Gran Canaria, Spain
継続期間: 2015 5 162015 5 24

Other

Other1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015
Spain
Gran Canaria
期間15/5/1615/5/24

    フィンガープリント

ASJC Scopus subject areas

  • Communication
  • Computer Networks and Communications

これを引用

Hirokawa, J., Suetsugu, S., Minamikata, Y., Nagatsuma, T., Seto, H., Inoue, Y., & Saito, M. (2015). Fabrication of plate-laminated waveguide for 350GHz band by silicon process. : 2015 1st URSI Atlantic Radio Science Conference, URSI AT-RASC 2015 [7302839] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/URSI-AT-RASC.2015.7302839