Fabrication of self-standing curved film with pillar arrays by large area spherical soft-UV imprint lithography

T. Kamibayashi, Hiroyuki Kuwae, A. Nobori, Shuichi Shoji, Jun Mizuno

研究成果: Conference contribution

抄録

We proposed a novel fabrication method of a pillar patterned self-standing curved film by spherical soft-UV imprint lithography. Soft-UV imprint lithography was performed using a patterned polydimethylsiloxane (PDMS) mold and a convex mold in order to pattern pillar onto large curved film. A mother patterned mold of spherical soft UV imprint lithography was prepared by unique 3D printer method. The curved film with the pillar pattern was successfully fabricated with a curvature radius of 40 mm. The proposed method is useful for 3D-structured fabrication of the optical devices.

本文言語English
ホスト出版物のタイトル2017 International Conference on Electronics Packaging, ICEP 2017
出版社Institute of Electrical and Electronics Engineers Inc.
ページ148-151
ページ数4
ISBN(電子版)9784990218836
DOI
出版ステータスPublished - 2017 6 5
イベント2017 International Conference on Electronics Packaging, ICEP 2017 - Tendo, Yamagata, Japan
継続期間: 2017 4 192017 4 22

Other

Other2017 International Conference on Electronics Packaging, ICEP 2017
国/地域Japan
CityTendo, Yamagata
Period17/4/1917/4/22

ASJC Scopus subject areas

  • 電子工学および電気工学
  • 産業および生産工学
  • 電子材料、光学材料、および磁性材料

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