Fabrication of self-standing curved film with pillar arrays by large area spherical soft-UV imprint lithography

T. Kamibayashi, Hiroyuki Kuwae, A. Nobori, Shuichi Shoji, Jun Mizuno

研究成果: Conference contribution

抜粋

We proposed a novel fabrication method of a pillar patterned self-standing curved film by spherical soft-UV imprint lithography. Soft-UV imprint lithography was performed using a patterned polydimethylsiloxane (PDMS) mold and a convex mold in order to pattern pillar onto large curved film. A mother patterned mold of spherical soft UV imprint lithography was prepared by unique 3D printer method. The curved film with the pillar pattern was successfully fabricated with a curvature radius of 40 mm. The proposed method is useful for 3D-structured fabrication of the optical devices.

元の言語English
ホスト出版物のタイトル2017 International Conference on Electronics Packaging, ICEP 2017
出版者Institute of Electrical and Electronics Engineers Inc.
ページ148-151
ページ数4
ISBN(電子版)9784990218836
DOI
出版物ステータスPublished - 2017 6 5
イベント2017 International Conference on Electronics Packaging, ICEP 2017 - Tendo, Yamagata, Japan
継続期間: 2017 4 192017 4 22

Other

Other2017 International Conference on Electronics Packaging, ICEP 2017
Japan
Tendo, Yamagata
期間17/4/1917/4/22

    フィンガープリント

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Industrial and Manufacturing Engineering
  • Electronic, Optical and Magnetic Materials

これを引用

Kamibayashi, T., Kuwae, H., Nobori, A., Shoji, S., & Mizuno, J. (2017). Fabrication of self-standing curved film with pillar arrays by large area spherical soft-UV imprint lithography. : 2017 International Conference on Electronics Packaging, ICEP 2017 (pp. 148-151). [7939344] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.23919/ICEP.2017.7939344