Fabrication of self-standing curved film with pillar arrays by large area spherical soft-UV imprint lithography

T. Kamibayashi, Hiroyuki Kuwae, A. Nobori, Shuichi Shoji, Jun Mizuno

研究成果: Conference contribution

抄録

We proposed a novel fabrication method of a pillar patterned self-standing curved film by spherical soft-UV imprint lithography. Soft-UV imprint lithography was performed using a patterned polydimethylsiloxane (PDMS) mold and a convex mold in order to pattern pillar onto large curved film. A mother patterned mold of spherical soft UV imprint lithography was prepared by unique 3D printer method. The curved film with the pillar pattern was successfully fabricated with a curvature radius of 40 mm. The proposed method is useful for 3D-structured fabrication of the optical devices.

元の言語English
ホスト出版物のタイトル2017 International Conference on Electronics Packaging, ICEP 2017
出版者Institute of Electrical and Electronics Engineers Inc.
ページ148-151
ページ数4
ISBN(電子版)9784990218836
DOI
出版物ステータスPublished - 2017 6 5
イベント2017 International Conference on Electronics Packaging, ICEP 2017 - Tendo, Yamagata, Japan
継続期間: 2017 4 192017 4 22

Other

Other2017 International Conference on Electronics Packaging, ICEP 2017
Japan
Tendo, Yamagata
期間17/4/1917/4/22

Fingerprint

Lithography
Fabrication
3D printers
Polydimethylsiloxane
Optical devices
baysilon

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Industrial and Manufacturing Engineering
  • Electronic, Optical and Magnetic Materials

これを引用

Kamibayashi, T., Kuwae, H., Nobori, A., Shoji, S., & Mizuno, J. (2017). Fabrication of self-standing curved film with pillar arrays by large area spherical soft-UV imprint lithography. : 2017 International Conference on Electronics Packaging, ICEP 2017 (pp. 148-151). [7939344] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.23919/ICEP.2017.7939344

Fabrication of self-standing curved film with pillar arrays by large area spherical soft-UV imprint lithography. / Kamibayashi, T.; Kuwae, Hiroyuki; Nobori, A.; Shoji, Shuichi; Mizuno, Jun.

2017 International Conference on Electronics Packaging, ICEP 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 148-151 7939344.

研究成果: Conference contribution

Kamibayashi, T, Kuwae, H, Nobori, A, Shoji, S & Mizuno, J 2017, Fabrication of self-standing curved film with pillar arrays by large area spherical soft-UV imprint lithography. : 2017 International Conference on Electronics Packaging, ICEP 2017., 7939344, Institute of Electrical and Electronics Engineers Inc., pp. 148-151, 2017 International Conference on Electronics Packaging, ICEP 2017, Tendo, Yamagata, Japan, 17/4/19. https://doi.org/10.23919/ICEP.2017.7939344
Kamibayashi T, Kuwae H, Nobori A, Shoji S, Mizuno J. Fabrication of self-standing curved film with pillar arrays by large area spherical soft-UV imprint lithography. : 2017 International Conference on Electronics Packaging, ICEP 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 148-151. 7939344 https://doi.org/10.23919/ICEP.2017.7939344
Kamibayashi, T. ; Kuwae, Hiroyuki ; Nobori, A. ; Shoji, Shuichi ; Mizuno, Jun. / Fabrication of self-standing curved film with pillar arrays by large area spherical soft-UV imprint lithography. 2017 International Conference on Electronics Packaging, ICEP 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 148-151
@inproceedings{b08e391139484ba2a5a5e92a1db4a62d,
title = "Fabrication of self-standing curved film with pillar arrays by large area spherical soft-UV imprint lithography",
abstract = "We proposed a novel fabrication method of a pillar patterned self-standing curved film by spherical soft-UV imprint lithography. Soft-UV imprint lithography was performed using a patterned polydimethylsiloxane (PDMS) mold and a convex mold in order to pattern pillar onto large curved film. A mother patterned mold of spherical soft UV imprint lithography was prepared by unique 3D printer method. The curved film with the pillar pattern was successfully fabricated with a curvature radius of 40 mm. The proposed method is useful for 3D-structured fabrication of the optical devices.",
keywords = "3D fabrication, curved surface, optical devices, self-standing film, soft-UV imprint",
author = "T. Kamibayashi and Hiroyuki Kuwae and A. Nobori and Shuichi Shoji and Jun Mizuno",
year = "2017",
month = "6",
day = "5",
doi = "10.23919/ICEP.2017.7939344",
language = "English",
pages = "148--151",
booktitle = "2017 International Conference on Electronics Packaging, ICEP 2017",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
address = "United States",

}

TY - GEN

T1 - Fabrication of self-standing curved film with pillar arrays by large area spherical soft-UV imprint lithography

AU - Kamibayashi, T.

AU - Kuwae, Hiroyuki

AU - Nobori, A.

AU - Shoji, Shuichi

AU - Mizuno, Jun

PY - 2017/6/5

Y1 - 2017/6/5

N2 - We proposed a novel fabrication method of a pillar patterned self-standing curved film by spherical soft-UV imprint lithography. Soft-UV imprint lithography was performed using a patterned polydimethylsiloxane (PDMS) mold and a convex mold in order to pattern pillar onto large curved film. A mother patterned mold of spherical soft UV imprint lithography was prepared by unique 3D printer method. The curved film with the pillar pattern was successfully fabricated with a curvature radius of 40 mm. The proposed method is useful for 3D-structured fabrication of the optical devices.

AB - We proposed a novel fabrication method of a pillar patterned self-standing curved film by spherical soft-UV imprint lithography. Soft-UV imprint lithography was performed using a patterned polydimethylsiloxane (PDMS) mold and a convex mold in order to pattern pillar onto large curved film. A mother patterned mold of spherical soft UV imprint lithography was prepared by unique 3D printer method. The curved film with the pillar pattern was successfully fabricated with a curvature radius of 40 mm. The proposed method is useful for 3D-structured fabrication of the optical devices.

KW - 3D fabrication

KW - curved surface

KW - optical devices

KW - self-standing film

KW - soft-UV imprint

UR - http://www.scopus.com/inward/record.url?scp=85021444405&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85021444405&partnerID=8YFLogxK

U2 - 10.23919/ICEP.2017.7939344

DO - 10.23919/ICEP.2017.7939344

M3 - Conference contribution

AN - SCOPUS:85021444405

SP - 148

EP - 151

BT - 2017 International Conference on Electronics Packaging, ICEP 2017

PB - Institute of Electrical and Electronics Engineers Inc.

ER -