Fabrication of Sputtered Low-strain, Low-loss SiN Waveguide for Optical Phased Array Device

Masaki Nishimura, Hayato Takemura, Toshimasa Umezawa, Wittawat Yamwong, Tetsuya Kawanishi, Naokatsu Yamamoto, Nipapan Klunngien

研究成果: Conference contribution

抄録

We fabricated sputtered SiN-waveguides with film stress-free, low-loss waveguide at room temperature for optical phased array devices. The beam steering performance was also estimated using the sputtered thick SiN waveguide.

本文言語English
ホスト出版物のタイトル25th Opto-Electronics and Communications Conference, OECC 2020
出版社Institute of Electrical and Electronics Engineers Inc.
ISBN(電子版)9781728154459
DOI
出版ステータスPublished - 2020 10 4
イベント25th Opto-Electronics and Communications Conference, OECC 2020 - Taipei, Taiwan, Province of China
継続期間: 2020 10 42020 10 8

出版物シリーズ

名前25th Opto-Electronics and Communications Conference, OECC 2020

Conference

Conference25th Opto-Electronics and Communications Conference, OECC 2020
CountryTaiwan, Province of China
CityTaipei
Period20/10/420/10/8

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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