Fabrication of the Perfluoro Polymer Passivated PDMS Microstructure

Daisuke Uchida, Masaki Kanai, Takahiro Nishimoto, Shuichi Shoji

研究成果: Article査読

4 被引用数 (Scopus)

抄録

PDMS microstructures whose whole inner surfaces are covered with perfluoro polymer are described. The major problems of PDMS microfluidic devices in Micro Total Analysis Systems (µTAS) applications are surface degradation with organic solvents and unexpected adsorption of chemical materials. In order to overcome these problems, perfluoro amorphous polymer is coated on the PDMS micro structures. This method is useful to realize chemical durability of the PDMS microfluidic devices. And novel method for fabricating metal electrodes on the perfluoro polymer is also proposed.

本文言語English
ページ(範囲)364-368
ページ数5
ジャーナルieej transactions on sensors and micromachines
124
10
DOI
出版ステータスPublished - 2006

ASJC Scopus subject areas

  • 機械工学
  • 電子工学および電気工学

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