Fabrication of two-dimensional photonic structure of titanium dioxide with sub-micrometer resolution by deep x-ray lithography

Koichi Awazu, Makoto Fujimaki, Xiaomin Wang, Akihide Sai, Yoshimichi Ohki

    研究成果: Conference contribution

    4 引用 (Scopus)

    抄録

    Two dimensional photonic crystals of titanium dioxide is expected to have many advantage compared with photonic crystals of semiconductors, e.g., silicon and GaAs. For example, low optical loss in the near infrared region used for optical communication, low thermal expansion, and its refractive index which is close to that for optical fiber are attractive advantages. However, it is difficult to create micro-nano structure in titanium dioxide because micro-fabrication technique for semiconductor is not available for titanium dioxide. As the first step we calculated photonic band gap of titanium dioxide rod-slab on SiO 2. Also, band gap percent against thickness of the rod-slab was examined. Finally, we confirmed the most suitable structure of 2D photonic crystals. Deep x-ray lithography technique was employed for create a very deep and precise template of PMMA. Then, liquid-phase deposition was used to faithfully deposit a tightly packed layer of titanium oxide onto the template. Finally, the template is selectively removed to obtain a photonic nano-structure. We also calculate photonic band gap on the 3D-structure of TiO 2. A template for the most appropriate structure was fabricated by the method proposed by Yablonovitch. By using of the same method, it was successful to obtain 3D structure of TiO 2. Refractive index of obtained TiO 2 followed by heating at 700°C was determined to 2.5 which is close to that for anatase phase.

    元の言語English
    ホスト出版物のタイトルMaterials Research Society Symposium Proceedings
    編集者J. Liu, D. McIlroy, L. Merhari, J.P. Pendry, J.T. Borenstein, P. Grodzinski, L.P. Lee, Z.L. Wang
    ページ295-300
    ページ数6
    820
    出版物ステータスPublished - 2004
    イベントNanoengineered Assemblies and Advanced Micro/Nanosystems - San Francisco, CA, United States
    継続期間: 2004 4 132004 4 16

    Other

    OtherNanoengineered Assemblies and Advanced Micro/Nanosystems
    United States
    San Francisco, CA
    期間04/4/1304/4/16

    Fingerprint

    Titanium dioxide
    Photonics
    Lithography
    Fabrication
    X rays
    Photonic crystals
    Photonic band gap
    Refractive index
    Semiconductor materials
    Optical losses
    Titanium oxides
    Microfabrication
    Optical communication
    Thermal expansion
    Polymethyl Methacrylate
    Silicon
    Optical fibers
    Energy gap
    Deposits
    titanium dioxide

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials

    これを引用

    Awazu, K., Fujimaki, M., Wang, X., Sai, A., & Ohki, Y. (2004). Fabrication of two-dimensional photonic structure of titanium dioxide with sub-micrometer resolution by deep x-ray lithography. : J. Liu, D. McIlroy, L. Merhari, J. P. Pendry, J. T. Borenstein, P. Grodzinski, L. P. Lee, ... Z. L. Wang (版), Materials Research Society Symposium Proceedings (巻 820, pp. 295-300). [R4.5]

    Fabrication of two-dimensional photonic structure of titanium dioxide with sub-micrometer resolution by deep x-ray lithography. / Awazu, Koichi; Fujimaki, Makoto; Wang, Xiaomin; Sai, Akihide; Ohki, Yoshimichi.

    Materials Research Society Symposium Proceedings. 版 / J. Liu; D. McIlroy; L. Merhari; J.P. Pendry; J.T. Borenstein; P. Grodzinski; L.P. Lee; Z.L. Wang. 巻 820 2004. p. 295-300 R4.5.

    研究成果: Conference contribution

    Awazu, K, Fujimaki, M, Wang, X, Sai, A & Ohki, Y 2004, Fabrication of two-dimensional photonic structure of titanium dioxide with sub-micrometer resolution by deep x-ray lithography. : J Liu, D McIlroy, L Merhari, JP Pendry, JT Borenstein, P Grodzinski, LP Lee & ZL Wang (版), Materials Research Society Symposium Proceedings. 巻. 820, R4.5, pp. 295-300, Nanoengineered Assemblies and Advanced Micro/Nanosystems, San Francisco, CA, United States, 04/4/13.
    Awazu K, Fujimaki M, Wang X, Sai A, Ohki Y. Fabrication of two-dimensional photonic structure of titanium dioxide with sub-micrometer resolution by deep x-ray lithography. : Liu J, McIlroy D, Merhari L, Pendry JP, Borenstein JT, Grodzinski P, Lee LP, Wang ZL, 編集者, Materials Research Society Symposium Proceedings. 巻 820. 2004. p. 295-300. R4.5
    Awazu, Koichi ; Fujimaki, Makoto ; Wang, Xiaomin ; Sai, Akihide ; Ohki, Yoshimichi. / Fabrication of two-dimensional photonic structure of titanium dioxide with sub-micrometer resolution by deep x-ray lithography. Materials Research Society Symposium Proceedings. 編集者 / J. Liu ; D. McIlroy ; L. Merhari ; J.P. Pendry ; J.T. Borenstein ; P. Grodzinski ; L.P. Lee ; Z.L. Wang. 巻 820 2004. pp. 295-300
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