Fabrication of two-dimensional photonic structure of titanium dioxide with sub-micrometer resolution by deep x-ray lithography

Koichi Awazu, Makoto Fujimaki, Xiaomin Wang, Akihide Sai, Yoshimichi Ohki

研究成果: Conference article

4 引用 (Scopus)

フィンガープリント Fabrication of two-dimensional photonic structure of titanium dioxide with sub-micrometer resolution by deep x-ray lithography' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy