Fabrication of ZnO-based thermoelectric micro-devices by electrodeposition

Hinako Matsuo, Koichiro Yoshitoku, Mikiko Saito, Hidefumi Takahashi, Ichiro Terasaki, Takayuki Homma

研究成果: Article

5 引用 (Scopus)

抄録

In order to fabricate micro-thermoelectric devices, ZnO films were prepared via electrodeposition, and the effect of deposition condition on the films was investigated. It was found that morphology and crystallinity of ZnO films were strongly affected by applied potential, bath composition and bath temperature, and using the optimized condition, ZnO-based micro-thermoelectric devices were fabricated and device performance was evaluated. For electrodeposition, acetate ion was added into the bath to prevent several drawbacks such as formation of pits and cracks. From the solution containing zinc nitrate and sodium acetate as a source of acetate ion, ZnO films were electrodeposited. The films with smooth morphology and sufficient adhesion strength were obtained at −0.9 V vs. Ag/AgCl with the addition of 10 mmolL−1 sodium acetate. The films with higher crystallinity and thermoelectric properties were obtained from the bath with higher temperature of 80C. The micro-thermoelectric device, which consisted of four arrays and each array had 55 pairs of thermoelectric elements, was fabricated and it generated 0.73 nW as maximum power. The power density was approximately 40 times larger than that of the ZnO thin films, which demonstrated that electrodeposited ZnO could be applied to thermoelectric micro-devices.

元の言語English
ページ(範囲)D417-D422
ジャーナルJournal of the Electrochemical Society
165
発行部数9
DOI
出版物ステータスPublished - 2018 1 1

Fingerprint

Electrodeposition
electrodeposition
Fabrication
fabrication
acetates
baths
Sodium Acetate
crystallinity
Acetates
Sodium
sodium
Ions
Bond strength (materials)
nitrates
radiant flux density
Nitrates
ions
adhesion
Zinc
cracks

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrochemistry
  • Materials Chemistry

これを引用

Fabrication of ZnO-based thermoelectric micro-devices by electrodeposition. / Matsuo, Hinako; Yoshitoku, Koichiro; Saito, Mikiko; Takahashi, Hidefumi; Terasaki, Ichiro; Homma, Takayuki.

:: Journal of the Electrochemical Society, 巻 165, 番号 9, 01.01.2018, p. D417-D422.

研究成果: Article

Matsuo, Hinako ; Yoshitoku, Koichiro ; Saito, Mikiko ; Takahashi, Hidefumi ; Terasaki, Ichiro ; Homma, Takayuki. / Fabrication of ZnO-based thermoelectric micro-devices by electrodeposition. :: Journal of the Electrochemical Society. 2018 ; 巻 165, 番号 9. pp. D417-D422.
@article{578fd6defd2349738ba43f8a8d4a9a9b,
title = "Fabrication of ZnO-based thermoelectric micro-devices by electrodeposition",
abstract = "In order to fabricate micro-thermoelectric devices, ZnO films were prepared via electrodeposition, and the effect of deposition condition on the films was investigated. It was found that morphology and crystallinity of ZnO films were strongly affected by applied potential, bath composition and bath temperature, and using the optimized condition, ZnO-based micro-thermoelectric devices were fabricated and device performance was evaluated. For electrodeposition, acetate ion was added into the bath to prevent several drawbacks such as formation of pits and cracks. From the solution containing zinc nitrate and sodium acetate as a source of acetate ion, ZnO films were electrodeposited. The films with smooth morphology and sufficient adhesion strength were obtained at −0.9 V vs. Ag/AgCl with the addition of 10 mmolL−1 sodium acetate. The films with higher crystallinity and thermoelectric properties were obtained from the bath with higher temperature of 80◦C. The micro-thermoelectric device, which consisted of four arrays and each array had 55 pairs of thermoelectric elements, was fabricated and it generated 0.73 nW as maximum power. The power density was approximately 40 times larger than that of the ZnO thin films, which demonstrated that electrodeposited ZnO could be applied to thermoelectric micro-devices.",
author = "Hinako Matsuo and Koichiro Yoshitoku and Mikiko Saito and Hidefumi Takahashi and Ichiro Terasaki and Takayuki Homma",
year = "2018",
month = "1",
day = "1",
doi = "10.1149/2.0021810jes",
language = "English",
volume = "165",
pages = "D417--D422",
journal = "Journal of the Electrochemical Society",
issn = "0013-4651",
publisher = "Electrochemical Society, Inc.",
number = "9",

}

TY - JOUR

T1 - Fabrication of ZnO-based thermoelectric micro-devices by electrodeposition

AU - Matsuo, Hinako

AU - Yoshitoku, Koichiro

AU - Saito, Mikiko

AU - Takahashi, Hidefumi

AU - Terasaki, Ichiro

AU - Homma, Takayuki

PY - 2018/1/1

Y1 - 2018/1/1

N2 - In order to fabricate micro-thermoelectric devices, ZnO films were prepared via electrodeposition, and the effect of deposition condition on the films was investigated. It was found that morphology and crystallinity of ZnO films were strongly affected by applied potential, bath composition and bath temperature, and using the optimized condition, ZnO-based micro-thermoelectric devices were fabricated and device performance was evaluated. For electrodeposition, acetate ion was added into the bath to prevent several drawbacks such as formation of pits and cracks. From the solution containing zinc nitrate and sodium acetate as a source of acetate ion, ZnO films were electrodeposited. The films with smooth morphology and sufficient adhesion strength were obtained at −0.9 V vs. Ag/AgCl with the addition of 10 mmolL−1 sodium acetate. The films with higher crystallinity and thermoelectric properties were obtained from the bath with higher temperature of 80◦C. The micro-thermoelectric device, which consisted of four arrays and each array had 55 pairs of thermoelectric elements, was fabricated and it generated 0.73 nW as maximum power. The power density was approximately 40 times larger than that of the ZnO thin films, which demonstrated that electrodeposited ZnO could be applied to thermoelectric micro-devices.

AB - In order to fabricate micro-thermoelectric devices, ZnO films were prepared via electrodeposition, and the effect of deposition condition on the films was investigated. It was found that morphology and crystallinity of ZnO films were strongly affected by applied potential, bath composition and bath temperature, and using the optimized condition, ZnO-based micro-thermoelectric devices were fabricated and device performance was evaluated. For electrodeposition, acetate ion was added into the bath to prevent several drawbacks such as formation of pits and cracks. From the solution containing zinc nitrate and sodium acetate as a source of acetate ion, ZnO films were electrodeposited. The films with smooth morphology and sufficient adhesion strength were obtained at −0.9 V vs. Ag/AgCl with the addition of 10 mmolL−1 sodium acetate. The films with higher crystallinity and thermoelectric properties were obtained from the bath with higher temperature of 80◦C. The micro-thermoelectric device, which consisted of four arrays and each array had 55 pairs of thermoelectric elements, was fabricated and it generated 0.73 nW as maximum power. The power density was approximately 40 times larger than that of the ZnO thin films, which demonstrated that electrodeposited ZnO could be applied to thermoelectric micro-devices.

UR - http://www.scopus.com/inward/record.url?scp=85049241126&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85049241126&partnerID=8YFLogxK

U2 - 10.1149/2.0021810jes

DO - 10.1149/2.0021810jes

M3 - Article

AN - SCOPUS:85049241126

VL - 165

SP - D417-D422

JO - Journal of the Electrochemical Society

JF - Journal of the Electrochemical Society

SN - 0013-4651

IS - 9

ER -