Fabrication process of fluidic devices for producing fine droplets using a focused ion beam system

研究成果: Conference contribution

抄録

We conducted an experiment on the fabrication of fluidic devices for producing fine droplets. In our proposed method, multiple channels were fabricated by using a focused ion beam (FIB) system. The minimum feature top width was found to be approximately 56 nm. When both the target width and depth of one channel were set to 500 nm, the resultant top width was 750-780 nm, the bottom width was 250-320 nm, and the depth was 560 nm, almost achieving the target size for the channel depth.

元の言語English
ホスト出版物のタイトル16th International Conference on Nanotechnology - IEEE NANO 2016
出版者Institute of Electrical and Electronics Engineers Inc.
ページ795-798
ページ数4
ISBN(電子版)9781509039142
DOI
出版物ステータスPublished - 2016 11 21
イベント16th IEEE International Conference on Nanotechnology - IEEE NANO 2016 - Sendai, Japan
継続期間: 2016 8 222016 8 25

Other

Other16th IEEE International Conference on Nanotechnology - IEEE NANO 2016
Japan
Sendai
期間16/8/2216/8/25

Fingerprint

Fluidic devices
fluidics
Focused ion beams
ion beams
Fabrication
fabrication
Experiments

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics

これを引用

Nozaki, Y., Kanai, T., Matsuo, A., Tanaka, D., Yuito, I., Takeuchi, T., ... Shoji, S. (2016). Fabrication process of fluidic devices for producing fine droplets using a focused ion beam system. : 16th International Conference on Nanotechnology - IEEE NANO 2016 (pp. 795-798). [7751484] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NANO.2016.7751484

Fabrication process of fluidic devices for producing fine droplets using a focused ion beam system. / Nozaki, Yoshito; Kanai, T.; Matsuo, A.; Tanaka, Daiki; Yuito, Isamu; Takeuchi, Teruaki; Sekiguchi, Tetsushi; Shoji, Shuichi.

16th International Conference on Nanotechnology - IEEE NANO 2016. Institute of Electrical and Electronics Engineers Inc., 2016. p. 795-798 7751484.

研究成果: Conference contribution

Nozaki, Y, Kanai, T, Matsuo, A, Tanaka, D, Yuito, I, Takeuchi, T, Sekiguchi, T & Shoji, S 2016, Fabrication process of fluidic devices for producing fine droplets using a focused ion beam system. : 16th International Conference on Nanotechnology - IEEE NANO 2016., 7751484, Institute of Electrical and Electronics Engineers Inc., pp. 795-798, 16th IEEE International Conference on Nanotechnology - IEEE NANO 2016, Sendai, Japan, 16/8/22. https://doi.org/10.1109/NANO.2016.7751484
Nozaki Y, Kanai T, Matsuo A, Tanaka D, Yuito I, Takeuchi T その他. Fabrication process of fluidic devices for producing fine droplets using a focused ion beam system. : 16th International Conference on Nanotechnology - IEEE NANO 2016. Institute of Electrical and Electronics Engineers Inc. 2016. p. 795-798. 7751484 https://doi.org/10.1109/NANO.2016.7751484
Nozaki, Yoshito ; Kanai, T. ; Matsuo, A. ; Tanaka, Daiki ; Yuito, Isamu ; Takeuchi, Teruaki ; Sekiguchi, Tetsushi ; Shoji, Shuichi. / Fabrication process of fluidic devices for producing fine droplets using a focused ion beam system. 16th International Conference on Nanotechnology - IEEE NANO 2016. Institute of Electrical and Electronics Engineers Inc., 2016. pp. 795-798
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