Fabrication process of fluidic devices for producing fine droplets using a focused ion beam system

Yoshito Nozaki, T. Kanai, A. Matsuo, Daiki Tanaka, Isamu Yuito, Teruaki Takeuchi, Tetsushi Sekiguchi, Shuichi Shoji

研究成果: Conference contribution

抄録

We conducted an experiment on the fabrication of fluidic devices for producing fine droplets. In our proposed method, multiple channels were fabricated by using a focused ion beam (FIB) system. The minimum feature top width was found to be approximately 56 nm. When both the target width and depth of one channel were set to 500 nm, the resultant top width was 750-780 nm, the bottom width was 250-320 nm, and the depth was 560 nm, almost achieving the target size for the channel depth.

本文言語English
ホスト出版物のタイトル16th International Conference on Nanotechnology - IEEE NANO 2016
出版社Institute of Electrical and Electronics Engineers Inc.
ページ795-798
ページ数4
ISBN(電子版)9781509039142
DOI
出版ステータスPublished - 2016 11 21
イベント16th IEEE International Conference on Nanotechnology - IEEE NANO 2016 - Sendai, Japan
継続期間: 2016 8 222016 8 25

Other

Other16th IEEE International Conference on Nanotechnology - IEEE NANO 2016
国/地域Japan
CitySendai
Period16/8/2216/8/25

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 原子分子物理学および光学

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