We developed a Fabry-Perot (FP) optical modulator with electro-optic (EO) films fabricated by aerosol deposition (AD). We found the ferroelectric Pb(Zr,Ti)O3 film by AD produced a fairly high EO coefficient (>150 pm/V), approximately 10 times larger than that of LiNbO3. Since thick EO films greater than 5 μm can be deposited on a transparent electrode layer or a metallic mirror layer of the FP optical modulator by AD, the FP optical modulator can achieve low capacitance, resulting in high modulation speed. Transmittance spectra of the FP optical modulator coincided with the optical simulation spectra, which indicated that optical scattering in AD films and at the surface/boundary were very small. We demonstrated an optical intensity modulation with applied electric field to EO film of ferroelectric Pb (Zr, Ti)O3. We obtained a 4-dB modulation with 50 V for the 10-μm-thick modulator with dielectric multilayer mirror on a glass substrate.
|ジャーナル||Proceedings of SPIE - The International Society for Optical Engineering|
|出版ステータス||Published - 2005 12 1|
|イベント||Optomechatronic Micro/Nano Devices and Components - Sappora, Japan|
継続期間: 2005 12 5 → 2005 12 7
ASJC Scopus subject areas
- コンピュータ サイエンスの応用