Far-field and near-field optical readings of under-50 nm-sized pits

Sumio Hosaka*, Toshimichi Shintani, Hajime Koyanagi, Keizo Katoh, Tetsuya Nishida, Toshiharu Saiki, Tsuyoshi Hasegawa

*この研究の対応する著者

研究成果: Article査読

8 被引用数 (Scopus)

抄録

In this study, we investigated the limitations of optical reading of very fine pits using conventional optics, immersion lens optics and near-field optics. Using very fine pits < 100 nm in size formed by electron beam writing, a reflection-type depolarization scanning near-field optical microscope (SNOM) read very fine pits < 50nm in size. On the other hand, far-field optics read fine pits only > 160 nm in size using a lens with a numerical aperture (NA) of 0.95 (17 Gb/in2). In addition, an oil immersion lens optics with a NA of 1.4 read fine pits only 100 nm in size (45 Gb/in2). Advanced near-field optics is a promising tool for achieving ultrahigh-density optical reading of trillion bits/in2.

本文言語English
ページ(範囲)L884-L886
ジャーナルJapanese Journal of Applied Physics, Part 2: Letters
41
8 A
DOI
出版ステータスPublished - 2002 8 1
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(その他)
  • 物理学および天文学(全般)

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