TY - JOUR
T1 - Fiber-optic temperature sensor based on difference of thermal expansion coefficient between fused silica and metallic materials
AU - Li, Xuefeng
AU - Lin, Shuo
AU - Liang, Jinxing
AU - Zhang, Yupeng
AU - Oigawa, Hiroshi
AU - Ueda, Toshitsugu
PY - 2012
Y1 - 2012
N2 - In this paper, we report a novel fiber-optic Fabry-Perot interferometric (FFPI) temperature sensor based on the difference of thermal expansion coefficient between fused silica and metallic materials. The sensor head is made by a single-mode fiber (SMF). A gold film and a nickel film are sputtered and electroplated on the surface of the SMF. Then, a microcavity is micromachined by focused ion beam (FIB) milling. Because the thermal expansion coefficient of nickel is about 20 times of fused silica, the different thermal expansions force the sensor head to bend when the temperature is high or low. Its temperature sensitivity is over 14 pm°C in a wide range from 79°C to +70°C. And the coefficient of determination R 2 is excellent (over 0.995). Moreover, the metallic cylinder can reinforce the cavity spot of the fiber sensor, so that this kind of sensor can work in harsh environments. For the first time to the best of our knowledge, we report this type of FFPI temperature sensor based on difference of thermal expansion coefficient between fused silica and metallic materials.
AB - In this paper, we report a novel fiber-optic Fabry-Perot interferometric (FFPI) temperature sensor based on the difference of thermal expansion coefficient between fused silica and metallic materials. The sensor head is made by a single-mode fiber (SMF). A gold film and a nickel film are sputtered and electroplated on the surface of the SMF. Then, a microcavity is micromachined by focused ion beam (FIB) milling. Because the thermal expansion coefficient of nickel is about 20 times of fused silica, the different thermal expansions force the sensor head to bend when the temperature is high or low. Its temperature sensitivity is over 14 pm°C in a wide range from 79°C to +70°C. And the coefficient of determination R 2 is excellent (over 0.995). Moreover, the metallic cylinder can reinforce the cavity spot of the fiber sensor, so that this kind of sensor can work in harsh environments. For the first time to the best of our knowledge, we report this type of FFPI temperature sensor based on difference of thermal expansion coefficient between fused silica and metallic materials.
KW - Fabry-Perot interferometric (FFPI)
KW - fiber sensor
KW - focused ion beam milling
KW - thermal expansion coefficient
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U2 - 10.1109/JPHOT.2011.2181943
DO - 10.1109/JPHOT.2011.2181943
M3 - Article
AN - SCOPUS:84863027364
SN - 1943-0655
VL - 4
SP - 155
EP - 162
JO - IEEE Photonics Journal
JF - IEEE Photonics Journal
IS - 1
M1 - 6112705
ER -