Film growth of c-axis parallel oriented ZnO on entire surface of silica glass pipe for SH-SAW pipe sensor

Yuta Takamura, Shinji Takayanagi, Mami Matsukawa, Chizu Ishida, Takahiko Yanagitani

    研究成果: Conference contribution

    抄録

    SH-SAW is suitable for liquid sensors to measure conductivity and viscosity because it can propagate without the energy leakage into liquid. We have fabricated a SH-SAW sensor consisting of a c-axis parallel (11-20) oriented ZnO film on a silica glass plate [1]. On the other hand, the long-distance propagation is necessary in order to detect the small changes of the velocity and amplitude. One way to increase propagation distance is wave multiple roundtrips around the sensor. In previous study, the c-axis parallel oriented ZnO film was grown on a part of the glass pipe surface and the SH-BAW roundtrips were demonstrated [2]. However, the SH-SAW roundtrips were not observed because the ZnO film was not grown on the entire surface of the pipe. In this study, we demonstrated the entirepipe-surface deposition of c-axis parallel oriented ZnO film to obtain SH-SAW pipe sensor.

    元の言語English
    ホスト出版物のタイトル2017 IEEE International Ultrasonics Symposium, IUS 2017
    出版者IEEE Computer Society
    ISBN(電子版)9781538633830
    DOI
    出版物ステータスPublished - 2017 10 31
    イベント2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States
    継続期間: 2017 9 62017 9 9

    Other

    Other2017 IEEE International Ultrasonics Symposium, IUS 2017
    United States
    Washington
    期間17/9/617/9/9

    Fingerprint

    silica glass
    sensors
    propagation
    liquids
    leakage
    viscosity
    conductivity
    glass
    energy

    ASJC Scopus subject areas

    • Acoustics and Ultrasonics

    これを引用

    Takamura, Y., Takayanagi, S., Matsukawa, M., Ishida, C., & Yanagitani, T. (2017). Film growth of c-axis parallel oriented ZnO on entire surface of silica glass pipe for SH-SAW pipe sensor. : 2017 IEEE International Ultrasonics Symposium, IUS 2017 [8091911] IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2017.8091911

    Film growth of c-axis parallel oriented ZnO on entire surface of silica glass pipe for SH-SAW pipe sensor. / Takamura, Yuta; Takayanagi, Shinji; Matsukawa, Mami; Ishida, Chizu; Yanagitani, Takahiko.

    2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 2017. 8091911.

    研究成果: Conference contribution

    Takamura, Y, Takayanagi, S, Matsukawa, M, Ishida, C & Yanagitani, T 2017, Film growth of c-axis parallel oriented ZnO on entire surface of silica glass pipe for SH-SAW pipe sensor. : 2017 IEEE International Ultrasonics Symposium, IUS 2017., 8091911, IEEE Computer Society, 2017 IEEE International Ultrasonics Symposium, IUS 2017, Washington, United States, 17/9/6. https://doi.org/10.1109/ULTSYM.2017.8091911
    Takamura Y, Takayanagi S, Matsukawa M, Ishida C, Yanagitani T. Film growth of c-axis parallel oriented ZnO on entire surface of silica glass pipe for SH-SAW pipe sensor. : 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society. 2017. 8091911 https://doi.org/10.1109/ULTSYM.2017.8091911
    Takamura, Yuta ; Takayanagi, Shinji ; Matsukawa, Mami ; Ishida, Chizu ; Yanagitani, Takahiko. / Film growth of c-axis parallel oriented ZnO on entire surface of silica glass pipe for SH-SAW pipe sensor. 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 2017.
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