Flexible tactile sensor for shear stress measurement using transferred sub-μm-thick Si piezoresistive cantilevers
Kentaro Noda*, Hiroaki Onoe, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama
*この研究の対応する著者
研究成果: Article › 査読
22
被引用数
(Scopus)