Frequency-switchable polarity-inverted BAW resonators based on electric-field-induced piezoelectric PMN-PT/PZT epitaxial film stacks

Takahiro Shimidzu, Takahiko Yanagitani

研究成果: Article査読

4 被引用数 (Scopus)

抄録

Spontaneous polarization of tetragonal ferroelectrics cannot be inverted unless the applied electric field is greater than the coercive field. In the case of the cubic phase, on the other hand, polarization and piezoelectricity can be induced merely by applying an electric field. In this study, we proposed polarity-inverted cubic/tetragonal multilayer film resonators which allow switching between the fundamental and high-order mode resonances through the independent control of the polarization of the cubic layer. Frequency switching in bulk acoustic wave (BAW) resonators based on all-epitaxial cubic 0.95Pb(Mg1/3Nb2/3)O3 (PMN)-0.05PbTiO3 (PTO)/tetragonal Pb(Zr,Ti)O3 (PZT) bilayer film stacks is demonstrated theoretically and experimentally. Under a negative voltage application, which is less than the coercive field of the tetragonal PZT layers, a fundamental mode resonance (327 MHz) is observed, whereas a second-mode resonance (779 MHz) is observed under a positive voltage application in BAW resonators. A theoretical simulation based on Mason's equivalent circuit model, taking account of the polarity-inverted bilayer structure, shows good agreement with the experimental results.

本文言語English
論文番号114104
ジャーナルJournal of Applied Physics
126
11
DOI
出版ステータスPublished - 2019 9月 21

ASJC Scopus subject areas

  • 物理学および天文学(全般)

フィンガープリント

「Frequency-switchable polarity-inverted BAW resonators based on electric-field-induced piezoelectric PMN-PT/PZT epitaxial film stacks」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル