Functional 3-D pdms microchannels having slanted grooves embedded walls realizing spiral flow

Hironobu Sato*, Seiki Ito, Kenji Tajima, Norimune Orimoto, Shuichi Shoji

*この研究の対応する著者

研究成果: Conference article査読

3 被引用数 (Scopus)

抄録

This paper presents the functional three-dimensional microchannels whose top and side walls have slanted microgrooves. These microchannels could generate short pitch spiral flow for efficient chaotic mixing. We proposed a novel fabrication method of the 3-D SU-8 molds using 2 step inclined backside exposures and additional 2 step topside exposures. Since liquid in the channel flows along the grooves on the walls, optimum design of the pitch and placement of the slanted grooves enables efficient spiral flows in the channel.

本文言語English
ページ(範囲)693-696
ページ数4
ジャーナルProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
出版ステータスPublished - 2004 7 19
イベント17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands
継続期間: 2004 1 252004 1 29

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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