Functional SU-8-PET composite microchip including Au microdot array fabricated by low temperature polymer bonding

R. Yamamoto*, K. Sueyoshi, K. Otsuka, T. Kasahara, A. Nakahara, D. H. Yoon, J. Mizuno, T. Sekiguchi, S. Shoji

*この研究の対応する著者

研究成果

抄録

Au deposited SU-8 microdots comprised SU-8-PET microchip using low temperature polymer bonding technology is developed. A fine microdot array (1μm×1μm×0.5μm dots with 2μm pitch in area of 50μm×5mm) is fabricated by electron beam lithography (EBL) using SU-8 as a negative tone resist. A microchannel structure is formed with UV patterned SU-8 on a glass substrate. The SU-8 structure is sealed with a PET film by low temperature silane coupling bonding (140°C, 1.5MPa, 5min). The proposed microchip is fabricated successfully without leakage and is applicable as a microchip electrophoresis.

本文言語English
ホスト出版物のタイトル8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
ページ418-421
ページ数4
DOI
出版ステータスPublished - 2013 9 2
イベント8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 - Suzhou, China
継続期間: 2013 4 72013 4 10

出版物シリーズ

名前8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013

Other

Other8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
国/地域China
CitySuzhou
Period13/4/713/4/10

ASJC Scopus subject areas

  • 生化学、遺伝学、分子生物学(その他)
  • バイオテクノロジー

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