GAAS 1-KBIT STATIC RAM WITH A SHALLOW RECESSED-GATE STRUCTURE FET.

Satoshi Takano, Noriyuki Tanino, Tsutomu Yoshihara, Yasuo Mitsui, Kazuo Nishitani

研究成果: Article査読

7 被引用数 (Scopus)

抄録

A novel GaAs FET structure has been developed. In order to decrease the source resistance and gate capacitance a shallow n** plus implanted layer was formed between the gate and the source/drain region; then the gate region was slightly recessed. This FET has a high transconductance, low-source resistance, small gate capacitance, and small deviation of threshold voltage. It is suitable for high-speed GaAs LSIs. A 1-kbit static RAM has been designed and fabricated with this FET structure and an access time of 3. 8 ns with 38-mW power dissipation has been obtained.

本文言語English
ページ(範囲)1135-1139
ページ数5
ジャーナルIEEE Transactions on Electron Devices
ED-32
6
出版ステータスPublished - 1985 6
外部発表はい

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)

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